Si含量对Si-GLC薄膜在海洋环境中摩擦学行为的影响  

Effect of Si Content on Tribological Properties of Si-GLC Film in Marine Environment

作　　者：郭武明 王春婷 王海新 朱烨彪 GUO Wu-ming;WANG Chun-ting;WANG Hai-xin;ZHU Ye-biao(Key Laboratory of Marine Materials and Related Technologies,Key Laboratory of Marine Materials and Protective Technologies of Zhejiang,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Zhejiang Ningbo 315201,China;NBTM New Materials Group Co.,LTD,Zhejiang Ningbo 315191,China)

机构地区：[1]中国科学院宁波材料技术与工程研究所、中国科学院海洋新材料与应用技术重点实验室、浙江省海洋材料与防护技术重点实验室,浙江宁波315201 [2]东睦新材料集团股份有限公司,浙江宁波315191

出　　处：《表面技术》2023年第8期208-215,共8页Surface Technology

基　　金：宁波市科技创新2025重大专项(2022Z045)。

摘　　要：目的为改善类石墨(Graphite-like Carbon,GLC)薄膜在海洋工程中的摩擦学行为,扩展此类薄膜的进一步应用。方法采用磁控溅射技术制备了不同Si含量的Si-GLC薄膜。采用扫描电镜(SEM)、拉曼光谱设备对薄膜的形貌、成分和结构进行了分析,并用海水盐雾、高低温交变试验模拟海洋环境对薄膜的腐蚀作用,利用纳米压痕、往复式摩擦磨损试验机对薄膜的机械性能进行了评价。结果Si-GLC薄膜结构致密,受限于沉积方法,制备的Si-GLC薄膜具有富Si层和富C层交替生长的“伪多层”结构。随着Si含量的增加,C—Si单键的数量逐渐增多,Si-GLC薄膜中sp^(3)杂化键的含量逐步增加。Si-GLC薄膜中sp^(3)杂化键的含量随Si含量的增加而逐步上升,薄膜的硬度与弹性模量在Si质量分数为64.51%时到达最大值,分别为21.3 GPa和245.9 GPa。同时,Si含量较高的薄膜具有更好的耐盐雾、耐高低温交变特性,表现出更好的海洋环境适应性。结论Si质量分数为48.11%时Si-GLC表现出最佳的海洋环境适应性摩擦学性能,在不同试验条件下均具有较低(约0.1)且稳定的摩擦因数,证明在GLC薄膜中掺入适量的Si元素能够起到稳定薄膜内的单键结构,避免薄膜在摩擦过程中发生石墨化,达到提升薄膜耐磨性能的目的。GLC films are widely applied in the friction and wear fields due to their low friction coefficients and wear rates but they do not perform well in humid environment.Many researchers add Si element to GLC films to saturate sp2 bonds and improve the tribological properties especially in humid environment.However,it should be noticed that there are few studies which focus on the coupling between mechanical damages and corrosion damages of GLC films in marine engineering.The tribological properties of GLC films after corrosion should be considered because there are complex chemical reactions occurring on the surface in marine environment and the chemical components will be changed.In this work,Si-GLC films with different Si contents were prepared by magnetron sputtering technique(Teer CF-800)in order to improve the environmental suitability of GLC films applied in marine engineering.SEM(FEI Quanta FEG 250,equipped with Oxford EDS)and Raman spectrometer(Renishawin Via Reflex)were employed to observe the morphologies,composition and structures of the films.It was found that with the Si content increasing,the films would contain more sp^(3)."Pseudo multilayer"structure composed of Si-rich layers and C-rich layers was found in compact Si-GLC films due to the limitation of preparation technology and it would affect the mechanical properties of GLC films.The mechanical properties of Si-GLC films were tested by nanoindentation(MTS G200)and wear tester(UMT-3).Notably,environmental tests were conducted before the friction tests to simulate the marine environment.Seawater mist and high-low temperature cycles tests were carried out to evaluate the anti-corrosion properties of the Si-GLC films.It was found that the hardness and elastic modulus of the films reached the maximum value when Si content was 64.51wt.%,which were 21.3 GPa and 245.9 GPa,respectively.Meanwhile,the films with higher Si content performed better in seawater mist and high-low temperature cycle tests,showing the better adaptability to marine environment.Accord

关 键 词：SI含量 GLC薄膜 海水盐雾 高低温交变 润滑性 耐磨性 

分 类 号：TH117[机械工程—机械设计及理论]