柔性力敏传感器发展现状  

Development Status of Flexible Force Sensor

作　　者：苏倩 刘学婧 张军诗 刘磊 邢宇 SU Qian;LIU Xuejing;ZHANG Junshi;LIU Lei;XING Yu(School of Mechanical and Electrical Engineering,Xi'an Polytechnic University,Xi'an 710600,China;School of Aeronautics,Northwestern Polytechnical University,Xi'an 710072,China;School of Mechanical Engineering,Northwestern Polytechnical University,Xi'an 710072,China;State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an 710049,China)

机构地区：[1]西安工程大学机电工程学院,陕西西安710600 [2]西北工业大学航空学院,陕西西安710072 [3]西北工业大学机电学院,陕西西安710072 [4]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049

出　　处：《轻工机械》2023年第4期1-13,27,共14页Light Industry Machinery

基　　金：中国博士后科学基金(2020M683682XB);陕西省教育厅项目(22JK0404);陕西省高速公路施工机械重点实验室项目(300102251506);特种车辆及其传动系统智能制造国家重点实验室开放课题(GZ2019KF011)。

摘　　要：集高灵敏度、高柔韧性和易集成特点的柔性力敏传感器在电子皮肤、可穿戴设备、生物医药和人工智能等领域得到了广泛的研究。笔者通过总结压阻式、电容式、压电式和摩擦电型压力传感器近年来的研究进展,归纳分析了不同新型材料所制成传感器的优势和缺陷。在全面介绍了最新的柔性力敏传感器发展后,讨论了当下柔性传感器所存在的问题以及潜在的发展前景:探索新的传感原理,挖掘新型复合材料,研发性能优异的新型柔性力敏传感材料和器件。传感器综合性能的提升将是未来发展的方向。Flexible force-sensitive sensors with high sensitivity,flexibility and easy integration have been widely studied in the fields of electronic skin,wearable devices,biomedicine and artificial intelligence.This paper summarizes the research progress of piezoresistive,capacitive,piezoelectric and triboelectric pressure sensors in recent years,and condenses the advantages and disadvantages of sensors made of different new materials.After a comprehensive introduction of the latest development of flexible force-sensitive sensors,the existing problems and potential development prospects of flexible sensors are discussed.Exploring new sensing principles,mining new composite materials,developing new flexible force-sensitive sensing materials and devices with excellent performance.Realizing the improvement of comprehensive performance will be the key direction in the sensor field in the future.

关 键 词：柔性力敏传感器 可穿戴设备 导电复合材料 传感机理 

分 类 号：TH73[机械工程—仪器科学与技术]