小型化T/R组件MEMS环行器高质量一体化焊接工艺  

High Quality Integrated Soldering for MEMS Circulator in Miniaturized T/R Modules

作　　者：李强[1] 吴昱昆 汪秉庆 LI Qiang;WU Yukun;WANG Bingqing(Aperture Array and Space Exploration Laboratory of Anhui Province,The 38th Research Institute of CETC,Hefei 230088,China)

机构地区：[1]中国电子科技集团公司第三十八研究所孔径阵列与空间探测安徽省实验室,合肥230088

出　　处：《电子工艺技术》2023年第4期7-9,32,共4页Electronics Process Technology

基　　金：安徽省重点研究与开发计划(202104g01020014)。

摘　　要：微电子机械系统(MEMS)环行器作为微波电路重要器件得到广泛应用,可实现接收和发射射频信号隔离,同时作为射频信号传输控制器件,对焊接质量要求较高,焊接钎透率需达到85%以上(空洞率低于15%)。MEMS环行器在小型化微波收发组件中排列紧密,间距可达到几个毫米,永磁体之间相互作用力影响环行器的装配与焊接过程,对焊接质量带来巨大挑战。受空间限制传统压块工装无法克服磁体之间引力,通过优化工装设计,采取四探针一体化施压方式,实现对某小型化TR组件内小间距MEMS环行器限位与施压,完成高质量一体化焊接。MEMS circulator is widely used as an important component of microwave circuit,which can realize the isolation of receiving and transmitting radio frequency signals.MEMS circulator,as a radio frequency signal transmission control device,requires high soldering quality.The soldering brazing rate should be more than 85%(soldering void rate is less than 15%).The MEMS circulator is usually closely arranged in the miniaturized microwave T/R modules,and the space distance can reach several millimeters.The interaction between permanent magnets affects the assembly and soldering process of the circulator,which brings great challenges to the soldering quality.Due to space limitations,the traditional pressing block tooling cannot overcome the attraction between magnets.By optimizing the tooling design and adopting the four-probe integrated pressure method,the short-distance MEMS circulators in a miniaturized T/R module can be limited and pressed to complete high-quality integrated soldering.

关 键 词：MEMS环行器 一体化焊接 小型化T/R组件 四探针一体化工装 

分 类 号：TN405[电子电信—微电子学与固体电子学]