钛合金表面CrN涂层高温氧化及力学性能  

High temperature oxidation and mechanical properties of CrN coatings on titanium alloy surface

作　　者：徐帅 周艳文[1] 李金龙 张开策 粟志伟 王鼎 袁霞[2] XU Shuai;ZHOU Yanwen;LI Jinlong;ZHANG Kaice;SU Zhiwei;WANG Ding;YUAN Xia(School of Materials and Metallurgy,University of Science and Technology Liaoning,Anshan 114051,China;School of Materials Science and Engineering,Shenyang Ligong University,Shenyang 110168,China)

机构地区：[1]辽宁科技大学材料与冶金学院,辽宁鞍山114051 [2]沈阳理工大学材料科学与工程学院,辽宁沈阳110168

出　　处：《辽宁科技大学学报》2023年第3期187-195,共9页Journal of University of Science and Technology Liaoning

基　　金：国家自然科学资金(51972155)。

摘　　要：采用热丝增强等离子体磁控溅射技术,在Ti6Al4V(TC4)基体表面沉积单相CrN涂层,并分别在温度为400、500、600、700、800℃下空气中退火。采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)与能谱(EDS)、Raman光谱、原子力显微镜(AFM)、X射线荧光光谱仪(XRF)、划痕仪、纳米压痕仪、台阶仪和摩擦磨损仪分析涂层的物相组成、微观形貌、成分及力学性能。随着退火温度的升高,CrN所有取向的峰位均向右移动接近标准峰位,内应力得到释放。当退火温度达到600℃后,涂层表面氧化迹象明显,粗糙度升高,出现白色颗粒状Cr_(2)O_(3)。随退火温度升高,涂层与基体结合力提高,在800℃时临界失效载荷达到25.2 N;涂层硬度和弹性模量下降,硬度从未退火的24.86 GPa降至800℃的15.23 GPa,弹性模量从327 GPa降至260 GPa;涂层耐磨性小幅下降,磨损量从未退火的0.78×10^(-16)m^(3)/(m·N)上升至11.74×10^(-16)m^(3)/(m·N),但均远低于TC4基体的磨损量10371.61×10^(-16)m^(3)/(m·N)。划痕与摩擦磨损检测结果中,涂层均未出现分层及剥落现象。采用热丝增强等离子体磁控溅射技术在钛合金表面制备的CrN涂层,在高温环境下保持较高的耐磨损性能和与基体良好的结合力,提高了软质不耐磨的TC4基体在高温磨损环境的使用寿命。Single-phase CrN coating was deposited on Ti6Al4V(TC4)substrate by hot wire enhanced plasma magnetron sputtering and annealed in air at 400℃,500℃,600℃,700℃and 800℃respectively.The phase composition,microstructure,composition and mechanical properties of the coating were analyzed by Xray diffraction(XRD),scanning electron microscope(SEM)and energy spectrum(EDS),Raman,atomic force microscope(AFM),X-ray fluorescence spectrometer(XRF),scratch meter,nano indentation meter,step meter and friction and wear meter.With the annealing temperature increased,the peak positions of all CrN orientations moved towards to the standard position,indicated the internal stress release of the CrN coatings.When the annealing temperature reached 600℃,the CrN coatings surface showed obvious oxidation,roughness increased,and white granular Cr_(2)O_(3) was found.With the increase of annealing temperature,the adhesion between coating and substrate increased,and critical failure load reached 25.2 N at 800℃;the hardness of the CrN coatings decreased from 24.86 GPa to 15.23 GPa,the modulus decreased from 327 GPa to 260 GPa;the wear resistance of the CrN coatings decreased slightly,the wear volume increased from 0.78×10^(-16) m^(3)/(m·N)to 11.74×10^(-16) m^(3)/(m·N),far lower than 10371.61×10^(-16) m^(3)/(m·N)of the TC4 itself.There was no delamination or peeling of the CrN coatings in the scratches and friction and wear tests.The CrN coating prepared on titanium alloy surface by hot wire enhanced plasma magnetron sputtering technology has high wear resistance and co-deformation ability with the substrate under high temperature environment,which improves the service life of soft and non-wear-resistant TC4 substrate in high temperature wear resistance environment.

关 键 词：TC4钛合金 热丝增强等离子体磁控溅射 CRN涂层 抗氧化性 耐磨性 

分 类 号：TG174.4[金属学及工艺—金属表面处理]