面向金属基材的清洗技术及清洁度评价方法研究新进展  

Recent Progress of Cleaning Technologies and Cleanliness Evaluation Methods for Metal Substrates

作　　者：赵勇 郭江 冯健 王钦强 龙鹏宇 张金龙 张林伟 王朔 孟令刚 金洙吉[1] 康仁科[1] ZHAO Yong;GUO Jiang;FENG Jian;WANG Qinqiang;LONG Pengyu;ZHANG Jinlong;ZHANG Linwei;WANG Shuo;MENG Linggang;JIN Zhuji;KANG Renke(Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian 116024;Ningbo Institute,Dalian University of Technology,Ningbo 315000;School of Materials Science and Engineering,Dalian University of Technology,Dalian 116024)

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,大连116024 [2]大连理工大学宁波研究院,宁波315000 [3]大连理工大学材料科学与工程学院,大连116024

出　　处：《机械工程学报》2023年第13期290-313,共24页Journal of Mechanical Engineering

基　　金：国家重点研发计划资助项目(2018YFA0702900)。

摘　　要：清洗技术及清洁度评价的发展已难以满足制造业日益提升的要求,因此综述清洗技术及清洁度评价方法变得尤为重要。探讨了面向金属基材的干式及湿式清洗技术的原理、典型案例及发展水平;分析了清洁度定性及定量评价方法的特点、评价标准及使用范围。在此基础上,指出了清洗技术及清洁度评价方法的发展趋势。分析表明:高效复合清洗工艺及绿色清洗技术、多样化的清洁度评价方法及面向特定工艺的清洁度评价体系将是未来研究的重点关注问题;此外,提高基材初始清洁度,重视基材主动清洗技术将是进一步提升金属基材表面清洁度的关键。以金属基材的清洗及评价为视角系统地综述了清洗技术及清洁度评价方法的研究进展,为后续的相关研究提供了全面的参考。Reviewing the cleaning technologies and cleanliness evaluation methods becomes essential as the development of cleaning technologies and cleanliness evaluation methods has failed to fulfil the rising demands of the manufacturing industry.The principle,typical cases,and development status of dry and wet cleaning technologies for metal substrates are analysed.The characteristics,evaluation criteria,and application scope of qualitative and quantitative cleanliness evaluation methods are summarized.On this basis,the development trend of cleaning technologies and cleanliness evaluation methods is forecasted.The analysis shows that the efficient composite cleaning process and green cleaning technologies,the diversified cleanliness evaluation methods,and the cleanliness evaluation system for specific processes will be the significant concern of future research.In addition,improving the initial cleanliness of the substrate and attaching importance to the active cleaning technologies will be the core factor to further improve surface cleanliness.The progress of cleaning technologies and cleanliness evaluation methods were systematically reviewed from the perspective of cleaning and evaluation for metal substrates,providing a comprehensive reference for subsequent research.

关 键 词：清洗技术 清洁度评价方法 清洗机理 金属基材 

分 类 号：TG178[金属学及工艺—金属表面处理]