石英玻璃微流道超声振动磨削加工及流动阻力特性研究  

Study on Ultrasonic Vibration Grinding and Flow Resistance Characteristics ofQuartz Glass Micro-channel

作　　者：郭明荣 鲁艳军 陈润华 GUO Mingrong;LU Yanjun;CHEN Runhua(College of Mechatronics and Control Engineering,Shenzhen University,Shenzhen 518060,Guangdong,China)

机构地区：[1]深圳大学机电与控制工程学院,广东深圳518060

出　　处：《材料导报》2023年第17期119-125,共7页Materials Reports

基　　金：国家自然科学基金(51805334);中国台北科技大学与深圳大学学术合作专题(2020002)。

摘　　要：石英玻璃微流控芯片在医学诊断、生化分析和药物筛选等领域具有广阔的应用前景,高性能石英玻璃微流道的加工质量直接决定微流控芯片的使用性能。本工作采用超声振动磨削加工技术对石英玻璃微流道进行高效精密加工,首先研究了主轴转速N、进给速度vf、磨削深度ap和超声功率P对微流道表面质量和形状精度的影响,然后对超声振动磨削工艺参数进行优化,最后测试微流道的水流阻力,研究微流道水力直径对其流动阻力特性的影响。超声振动磨削加工实验结果表明:石英玻璃微流道的表面粗糙度Ra可达较小值0.191μm,形状精度RMS值和PV值分别达到3.332μm和23.783μm,并且微流道表面形貌完整,底部微观表面光滑,边缘整齐无明显崩边。流动性测试实验结果表明:石英玻璃微流道内流动摩擦阻力系数随雷诺数和水力直径的增大而减小,因此设计微流道时应尽量选择较大的水力直径,并且适当增大流速。Quartz glass microfluidic chips have broad application prospects in the fields of medical diagnosis, biochemical analysis and drug screening. The processing quality of high-performance quartz microchannel directly determines the performance of microfluidic chips. In this work, the ultrasonic vibration grinding technology was used to process the quartz glass microchannel efficiently and precisely. First, the effects of the spindle speed N , feed speed v f, grinding depth a p and the ultrasonic power P on the surface quality and shape accuracy of the microchannel were studied. Then the ultrasonic vibration grinding process parameters were optimized. Finally, the water flow resistance of the microchannel was tested to study the influences of the hydraulic diameter of the microchannel on flow resistance characteristics. The experimental results of ultraso- nic vibration grinding show that the surface roughness R a of the quartz glass microchannel can reach a minimum value of 0.191 μm, the shape accuracy RMS value and PV value can reach 3.332 μm and 23.783 μm, respectively. The surface morphology of microchannel is integrated with smooth bottom microscopic surface and regular edges without obvious breakage. The experimental results of the fluidity test show that the frictio- nal resistance coefficient of the flow in the quartz glass microchannel decreases with the increase of Reynolds number and hydraulic diameter. Therefore, when designing the microchannel, a larger hydraulic diameter should be selected and the flow rate should be appropriately increased.

关 键 词：超声振动磨削 微流道 表面粗糙度 形状精度 阻力特性 

分 类 号：TH161[机械工程—机械制造及自动化]