大角度双波段探测成像分光器件的研制  

Fabrication of Large-Angle Dual-Band Detection Imaging Splitter

作　　者：付秀华[1,2] 刘瑞奇 朱忠尧 韩克旭 王奔 刘俊岐 刘海成 Fu Xiuhua;Liu Ruiqi;Zhu Zhongyao;Han Kexu;Wang Ben;Liu Junqi;Liu Haicheng(School of OptoElectronic Engineering,Changchun University of Science and Technology,Changchun 130022,Jilin,China;Zhongshan Research Institute,Changchun University of Science and Technology,Zhongshan 528436,Guangdong,China;Beijing Institute of Space Mechatronics,Beijing 100094,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]长春理工大学中山研究院,广东中山528436 [3]北京空间机电研究所,北京100094

出　　处：《中国激光》2023年第14期63-70,共8页Chinese Journal of Lasers

基　　金：2022年度中山市第二批社会公益与基础研究项目(2022B2005);“十三五”共用技术预研基金(41423060202);长春市激光制造与检测装备科技创新中心资助项目(长科技合(2014219)号)。

摘　　要：在微光夜视与红外成像融合的光学系统中,光通过55°放置的分光镜分成两束光,其中反射光被微光探测器接收进行微光夜视成像,透射光被红外探测器接收进行红外成像,通过图像融合技术来提高系统的成像分辨率。针对分光镜的参数要求,笔者选用Ge、ZnS和YbF3作为沉积材料,采用离子源辅助沉积技术在多光谱ZnS基底上制备了0.6~0.9μm波段高反、3.7~4.8μm波段高透的分光膜。通过对膜系结构的优化以及沉积工艺参数的调整,解决了膜层牢固度和面形精度等问题,实现了0.6~0.9μm波段反射率为90.77%、3.7~4.8μm波段透射率为91.15%的分光指标。附着力测试、摩擦力测试、高低温测试、恒温恒湿测试结果显示所制备的双面膜可以满足使用要求,但该膜的短波反射率和长波透过率仍有一定的提升空间。Objective There are significant differences in the actual optical characteristics of specific targets in different spectral bands.Thus,the two imaging systems shared an aperture for detection and identification.The internal light was separately imaged after passing through an optical device that separated the visible near-infrared and infrared light.In this way,the light from the two bands could be used to synchronously detect and image the target,allowing it to track the target more effectively.Thus,it could meet the all-day,wide-range,and high-resolution detection requirements.There have been few research reports on visible near-infrared and midinfrared dual-band large-angle spectroscopy.Therefore,this research has an important reference value for dual-band infrared detection and imaging technology.Methods The width and reflectance of the cut-off band at large angles were studied using the evaporation coating method.After practical calculation,it was concluded that at least four groups of film stacks should be used as the initial film system.A spectral curve that met the requirements could be obtained based on this optimization of the initial film system.The stress of ZnS film is generally compressive,while the stress of YbF_(3) film is generally tensile.The control variable method was used to optimize the deposition process and adjust the corresponding thickness to change the stress of the ZnS and YbF_(3) single-layer films.Because the film system was formed by depositing alternate layers of high and low refractive index materials,the tensile stress and compressive stress could offset each other.Therefore,the deformation of the substrate was smaller when the single-layer stresses of the high and low refractive index materials with corresponding thicknesses were closer.The film system structure was analyzed based on the measured stress results,which showed that the two sides of the film could offset each other and tended to be smaller in the design.Results and Discussions Based on a study of the characteristics

关 键 词：光学器件 分光镜 微光夜视 中波红外成像 面形精度 

分 类 号：O484[理学—固体物理]