连续变焦微型液体柱透镜系统的设计与制备  

Design and Fabrication of a Continuous Zoom Liquid Micro-Cylindrical Lens System

作　　者：盛树武 呼德港 周琰武 王丹阳 孙丽存 Sheng Shuwu;Hu Degang;Zhou Yanwu;Wang Danyang;Sun Licun(School of Physics and Electronic Information,Yunnan Normal University,Kunming 650500,Yunnan,China;Yunnan Key Laboratory of OptoElectronic Information Technology,Kunming 650500,Yunnan,China)

机构地区：[1]云南师范大学物理与电子信息学院,云南昆明650500 [2]云南省光电信息与技术重点实验室,云南昆明650500

出　　处：《光学学报》2023年第14期229-237,共9页Acta Optica Sinica

基　　金：国家自然科学基金(62065019,61705192);云南省高层次科技人才及创新团队选拔专项-中青年学术和技术带头人后备人才项目(202205AC160029)。

摘　　要：设计并制备了一种具有较大变倍比及较高成像质量的充液式连续变焦微型柱透镜系统。该系统由埋入聚二甲基硅氧烷基片的两片对称弯月柱透镜及一片双凸柱透镜构成:两弯月柱透镜边缘位置胶合形成空腔,改变注入其中的液体折射率,可实现柱透镜系统的连续变焦;双凸柱透镜的优化设计可控制柱透镜系统整个变焦范围内的像差。当柱透镜系统中注入的液体折射率由1.3330变化到1.5530时,可实现系统后焦距由52.292~4.972 mm的连续平滑变化。整个变焦范围内,柱透镜系统径向弥散斑均方根半径始终小于5μm,接近衍射极限。对柱透镜系统的可能公差进行了详细分析,证实了该设计的可行性,并完成了透镜系统的加工制备及后焦距、调制传递函数曲线的测量。该变焦系统具有变倍比高、体积小、结构简单稳定、成像质量高等优势,可用于集成化的微型设备中。Objective In order to improve the adaptability of cylindrical lenses and expand their application fields,a continuous zoom liquid microcylindrical lens system was fabricated.Cylindrical lenses are widely used in engineering fields such as beam shaping,scanning equipment,and holographic display due to their irreplaceable ability in beam manipulation.However,the commonly used focal length of cylindrical lenses is always fixed,and most of the research on zoom systems always focuses on the commonly used symmetric circular lenses,while zoom cylindrical lenses are relatively unexplored.Therefore,a series of liquid zoom cylindrical lenses have been designed in our previous study,including compoundtype and capillarytype liquid core zoom cylindrical lenses.They change the refractive index of the core by changing the type or concentration of the liquid filled in the hollow area of the lens and then achieve the variable focal length.However,the compoundtype lens has a large size and is not easy to integrate.The capillarytype micro cylindrical lens system has a short focal length and small zoom range,which limit its application.To address the above problems,we aim to design and fabricate a new type of liquid zoom cylindrical lens system based on a polydimethylsiloxane(PDMS)substrate,which is characterized by a high zoom ratio,stable structure,small volume,and easy integration.The continuous zoom liquid microcylindrical lens system can be used to replace the fixed focus cylindrical lens in beam manipulation,providing a higher degree of freedom and adaptability and applied in the accurate measurement of liquid refractive index and liquid diffusion coefficient.Methods The design and fabrication of a continuous zoom liquid microcylindrical lens system mainly include four processes:establishment and optimization of the initial structure,zoom ability and imaging quality evaluation,tolerance analysis,and processing and fabrication.In this paper,the capillarytype liquid core microcylindrical lens based on a PDMS substrate designed i

关 键 词：光学设计与制备 变焦系统 液体柱透镜 成像质量 

分 类 号：O435[机械工程—光学工程]