飞秒激光在柔性PDMS中直写光波导器件研究进展  

Development of Femtosecond Laser Direct-Writing Optical Waveguide Devices in Flexible PDMS

作　　者：陈智 钟理京 陈梦佳 王宇莹 刘小峰[2] 马志军 邱建荣[3] Chen Zhi;Zhong Lijing;Chen Mengjia;Wang Yuying;Liu Xiaofeng;Ma Zhijun;Qiu Jianrong(Zhejiang Lab,Hangzhou 311100,Zhejiang,China;School of Materials Science and Engineering,Zhejiang University,Hangzhou 310027,Zhejiang,China;College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,Zhejiang,China)

机构地区：[1]之江实验室,浙江杭州311100 [2]浙江大学材料科学与工程学院,浙江杭州310027 [3]浙江大学光电科学与工程学院,浙江杭州310027

出　　处：《激光与光电子学进展》2023年第13期184-196,共13页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(62105297);浙江省自然科学基金(LZ23F050002,LQ22F050022)。

摘　　要：飞秒激光直写技术由于其超短脉冲持续时间、超高峰值功率、高制造精度和效率,已被广泛应用在透明硬碎材料中3D光波导器件的直写制备。近年来,通过飞秒激光在柔性聚二甲基硅氧烷(PDMS)中直写光波导器件越来越受到人们的关注。本综述从3个方面介绍飞秒激光直写技术在柔性PDMS中直写Type-Ⅰ型光波导器件的最新研究进展,包括:飞秒激光直写不同类型光波导的基本原理;近5年来飞秒激光在柔性PDMS中直写Type-Ⅰ型光波导所涉及的材料设计、直写原理和工艺;基于飞秒激光直写柔性PDMS光波导器件在衍射光栅和耳蜗内窥镜的应用研究进展。最后,对该领域研究进展进行总结、分析、归纳,并展望该领域未来研究、应用和发展方向。The femtosecond laser direct-writing technique has been extensively explored for fabricating three-dimensional optical waveguide devices in transparent,hard,and fragile materials owing to its ultrashort pulse duration,ultrahigh peak power,high manufacturing precision,and efficiency.Recently,there is a growing interest in producing optical waveguide devices in flexible polydimethylsiloxane(PDMS)using the femtosecond laser direct-writing technique.This study reviewed the latest development in femtosecond laser direct-writing Type-Ⅰ optical waveguide devices in flexible PDMS,focusing on three aspects:the basic principle of different kinds of optical waveguide written by femtosecond laser;materials design,direct-writing principle,and processing technology of Type-Ⅰ optical waveguide directly-written by femtosecond laser in flexible PDMS in last five years;and research progress of the application of the optical waveguide devices in flexible PDMS based on femtosecond laser direct-writing technique for diffraction gratings and cochlear endoscope.Finally,herein,the research progress in this field is summarized,analyzed and concluded,and the future research,application,and developmental direction are outlined.

关 键 词：飞秒激光直写 柔性PDMS Type-Ⅰ型光波导 光波导器件 

分 类 号：TN249[电子电信—物理电子学]