晶圆划片机气浮主轴的常见问题及其处理方法  

Common Problems and Solutions of Air Bearing Spindle in Wafer Dicing Saw

作　　者：王英杰 WANG Yingjie(CETC Beijing Electronic Equipment Co.,Ltd.,Beijing 100176,China)

机构地区：[1]北京中电科电子装备有限公司,北京100176

出　　处：《电子工业专用设备》2023年第4期49-51,共3页Equipment for Electronic Products Manufacturing

摘　　要：介绍了划片机气浮主轴使用过程中出现的常见问题,分析了问题的起因,针对每一种情况,提出了相应的处理方法;根据这些问题和处理方法,有针对性地在日常使用中定期检查保养,进而提高气浮主轴的使用寿命。The common problems are introduced in this paper that occur during the use process of air bearing spindle of dicing saw,and analyzing the causes of the problems,and proposing the corresponding treatment methods for each situation.Based on these issues and handling methods,targeted regular inspections and maintenance should be carried out in daily use to improve its service life of air bearing spindle.

关 键 词：气浮主轴 划片机 维修方法 

分 类 号：TN305.1[电子电信—物理电子学]