266 nm纳秒固体激光在PS上打孔的工艺实验研究  

Experimental investigation on 266 nm nanosecond laser drilling of PS

作　　者：齐立涛[1] 李存涛 刘凤聪 QI Litao;LI Cuntao;LIU Fengcong(Institute of Advanced Laser Manufacturing,Heilongjiang University of Science and Technology,Harbin 150022,China;School of Mechanical Engineering,Heilongjiang University of Science and Technology,Harbin 150022,China)

机构地区：[1]黑龙江科技大学激光先进制造研究所,哈尔滨150022 [2]黑龙江科技大学机械工程学院,哈尔滨150022

出　　处：《激光技术》2023年第4期513-519,共7页Laser Technology

基　　金：黑龙江省省属高等学校基本科研业务费科研项目(2018-KYYWF-1168)。

摘　　要：为了研究266 nm纳秒固体激光在聚苯乙烯(PS)上打孔的材料去除机理、工艺规律和优化工艺参数,采用了单因素实验法和正交实验法进行了单脉冲和多脉冲打孔的实验研究。分析了材料的去除机理,得到了脉冲数量、脉冲能量以及离焦量对微孔直径和深度的影响规律,获得了满足要求的工艺参数的优化组合。结果表明,单脉冲打孔条件下,脉冲能量为0.110 mJ时加工出的微孔形状规则、圆度较好以及重铸层宽度较小,脉冲能量为0.500 mJ时,加工出的微孔形状和圆度质量变差,重铸层宽度增大;多脉冲打孔条件下,脉冲能量为0.040 mJ时,加工出的通孔入口处无重铸层,去除机理以光化学作用为主,脉冲能量为0.390 mJ时,加工出的通孔入口处重铸层较为明显,且入口边缘出现过烧蚀现象,去除机理以光热作用为主;脉冲能量和离焦量对孔径影响较大,脉冲数量和正离焦量对孔深影响较大;正交实验得到的优化参数组合为脉冲数量50、脉冲能量0.021 mJ、离焦量0μm时,可以加工出质量较好的微孔。本研究为266 nm纳秒激光加工聚苯乙烯靶球提供了参考依据。In order to investigate the material removal mechanism,technological rules,and optimization of technological parameters,experimental investigations of laser drilling on polystyrene(PS)with single-pulse and multi-pulse nanosecond solidstate laser at 266 nm based on the single factor experiment and orthogonal experiment method were carried out.The material removal mechanism was analyzed,and the relationship between the diameter and depth of the micropore and the number of laser pulses,the laser pulse energy and the defocusing distance was obtained.As well as an optimized combination of process parameters meeting the requirements was acquired.The experimental results show that when the laser pulse energy is 0.110 mJ,the micropore with regular shape,better roundness,and smaller recast layer was obtained;when the laser pulse energy is 0.500 mJ,the shape and roundness of micropore becomes worse,and the width of recast layer becomes larger at the same time.During the multi-pulse drilling,no recast layer is present at the entrance of the through-hole with the laser pulse energy of 0.040 mJ,and the removal mechanism is mainly photochemical.With the laser pulse energy of 0.390 mJ,the recast layer is more visible at the entrance of the through-hole and over-ablation occurs at the entrance edge,the removal mechanism is mainly photothermal.Laser pulse energy and defocusing distance have a large effect on the hole diameter,and the number of laser pulses and positive defocusing distance have a large effect on the hole depth.The optimized combination of parameters obtained from the orthogonal experiments that micropores of good quality can be produced when the number of laser pulses is 50,laser pulse energy is 0.021 mJ and defocusing distance is 0μm.This investigation provides a reference for 266 nm nanosecond laser processing of polystyrene target.

关 键 词：激光技术 材料去除机理 工艺实验 266 nm纳秒激光 聚苯乙烯 微孔 

分 类 号：TN249[电子电信—物理电子学] V261.8[航空宇航科学与技术—航空宇航制造工程]