触针式表面轮廓测量仪校准方法研究  

Research On Calibration Method of Contact Surface Contour Tester

作　　者：臧军 何庆雨 孙磊 王传海 李阳 管倩倩 ZANG Jun;HE Qingyu;SUN Lei;WANG Chuanhai;LI Yang;GUAN Qianqian

机构地区：[1]山东省计量科学研究院 [2]山东省计量检测中心

出　　处：《计量与测试技术》2023年第8期70-71,75,共3页Metrology & Measurement Technique

摘　　要：触针式表面轮廓测量仪主要是测量机械零部件的二维形状和位置参数,广泛应用于高端装备制造业。为了保证轮廓仪测量结果的准确可靠,为校准工作提供依据,本文对其校准方法进行了研究。Contact surface contour tester is mainly used to measure the two-dimensional shape and position parameters of mechanical parts,and is widely used in high-end equipment manufacturing industry.In order to ensure accuracy and reliabilit of contour tester measurement results and provide basis for calibration of the instrument,the calibration method of contour tester is studied in this paper.

关 键 词：轮廓仪 校准方法 不确定度 

分 类 号：TG807[金属学及工艺—公差测量技术]