eFuse器件的电迁移三维有限元仿真  

3D Finite Element Simulation for Electromigration of eFuse Devices

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作  者:王锦任 王家佳 赵晨阳 刘海南[2,3] 李多力[2,3] Wang Jinrenn;Wang Jiajia;Zhao Chenyang;Liu Hainann;Li Duoli(School of Integrated Circuits,University of Chinese Academy of Sciences,Beijing 100049,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Key Laboratory of Science and Technology on Silicon Devices,Chinese Academy of Sciences,Beijing 100029,China)

机构地区:[1]中国科学院大学集成电路学院,北京100049 [2]中国科学院微电子研究所,北京100029 [3]中国科学院硅器件技术重点实验室,北京100029

出  处:《半导体技术》2023年第7期577-584,599,共9页Semiconductor Technology

摘  要:应用有限元分析软件建立了电可编程熔丝(eFuse)器件的三维有限元模型,通过离子流通量散度法和最小原子浓度法对eFuse器件的电迁移熔断过程进行了多物理场耦合有限元仿真,仿真结果能够较好地拟合器件的实际熔断效果。通过仿真对比了不同阴极面积和不同编程电压条件下的电迁移过程及熔断效果。结果表明,更大的阴极面积能够提高熔丝局部的温度梯度,从而提高熔断效率;更高的编程电压能够提供更高的电流密度和温度,从而加速电迁移的发生并增大了eFuse熔断区的面积。提出了一种具有外部辅助加热功能的eFuse器件结构,并在不同条件下进行了电迁移熔断仿真,结果表明该结构能够显著提高eFuse器件局部的离子流通量散度,从而提高eFuse存储单元的熔断效率和编程良率。A three-dimensional finite element model of the electrical fuse(eFuse)device was established using finite element analysis software.The electromigration blowing process of the eFuse device was simulated by the coupled multi-physics finite element method using the ionic flux divergence method and the minimum atomic concentration method.The simulation results can well fit the actual blowing results of the device.The electromigration process and blowing results under the conditions of different cathode areas and programming voltages were compared through simulation.The results show that a larger cathode area can increase the local temperature gradient of the fuse,thus improving the blowing efficiency.A higher programming voltage can provide higher current density and temperature to accelerate the electromigration and increase the blowing area of the eFuse.An eFuse device with external auxiliary heating structure was proposed and the electromigration blowing simulation was performed under different conditions.The results show that the proposed structure can significantly improve the local ionic flux divergence of the eFuse device,thus improving the blowing efficiency and programming yield of the eFuse storage unit.

关 键 词:电可编程熔丝(eFuse) 电迁移 有限元仿真 离子流通量散度 热断裂 

分 类 号:TN389[电子电信—物理电子学]

 

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