热场发射扫描电镜中的复合物镜和镜筒内探测系统  

Exploration of Compound Lens and In-Column Detector Systems in Schottky Emission Scanning Electron Microscope

作　　者：高尚 马清 孙千[3] 黄梦诗 陈双文 张青 GAO Shang;MA Qing;SUN Qian;HUANG Mengshi;CHEN Shuangwen;ZHANG Qing(School of Materials Science and Engineering,Harbin Institute of Technology(Shenzhen),Shenzhen 518055,China;Education Center of Experiments and Innovations,Harbin Institute of Technology(Shenzhen),Shenzhen 518055,China;School of Materials Science and Engineering,South China University of Technology,Guangzhou 510640,China;Carl Zeiss(Shanghai)Co.Ltd.,Guangzhou 510623,China)

机构地区：[1]哈尔滨工业大学(深圳)材料科学与工程学院,广东深圳518055 [2]哈尔滨工业大学(深圳)实验与创新实践教育中心,广东深圳518055 [3]华南理工大学材料科学与工程学院,广东广州510640 [4]卡尔蔡司(上海)管理有限公司,广东广州510623

出　　处：《测试技术学报》2023年第5期400-407,共8页Journal of Test and Measurement Technology

基　　金：教育部产学合作协同育人资助项目(201802284007);哈尔滨工业大学(深圳)创新实验资助项目(INEP1013)。

摘　　要：为了解释镜筒内探测器对信号发射角衬度反映的依赖,借助光镜像差类比方法解释物镜和探测系统协调工作以探测信号的原理,最后分析了两种当前使用复合物镜的探测系统。以上研究表明,在当代热场发射扫描电镜中,借助物镜的磁场和电场,物镜和探测系统协同能够实现筛分和过滤信号的目的,使用光镜类比可以成功地理解各种镜筒内探测器对信号的接收情况。To explain the dependence of in-column detectors on signal emission angle and contrast displaying,the article explains the principle of co-working of the objective lens and detector systems with the help of optical aberration analogy,and finally analyzes the principles of two current detector systems used in the compound lens.It is shown that in contemporary Schottky emission SEM,with the help of the magnetic and electric fields,the synergy of objective lens and detection system can achieve the purpose of sieving and filtering signals,and the use of optical aberration analogy can successfully understand the reception of signals by detectors within various objective lenses.

关 键 词：场发射扫描电镜 低加速电压 复合物镜 镜筒内探测器 

分 类 号：TG115.215.3[金属学及工艺—物理冶金]