微通道板BeO防离子反馈膜粒子阻透率的模拟研究  

Simulations on the Particle Blocking and Transmitting Performance of Microchannel Plate BeO Ion Barrier Film

作　　者：鲁蓝霜 王国政[1] 夏加 张益博 杨继凯[1] LU Lanshuang;WANG Guozheng;XIA Jia;ZHANG Yibo;YANG Jikai(School of Physics,Changchun University of Science and Technology,Changchun 130022,CHN)

机构地区：[1]长春理工大学物理学院,长春130022

出　　处：《半导体光电》2023年第3期400-403,共4页Semiconductor Optoelectronics

摘　　要：带有防离子反馈膜的微通道板是第三代微光像增强器件中的核心部件。文章阐述了防离子反馈膜的电子透过、离子阻止特性,利用Monte-Carlo模拟方法计算了氧化铍和三氧化二铝防离子反馈膜电子透过率和离子阻止率在不同条件下的变化曲线。模拟结果表明,氧化铍薄膜比三氧化二铝薄膜的电子透过特性好,而三氧化二铝薄膜比氧化铍薄膜的离子阻止本领好,证实了氧化铍作为防离子反馈膜的可行性。Microchannel plate(MCP) with ion barrier films is the core component in Low Light Level(LLL) Image Intensifier tubes in Generation Ⅲ.In this paper,the electron transmittance and ion blocking properties of IBFs were described.Monte-Carlo simulation method was used to calculate the electron transmittance and ion blocking ratio of BeO and Al_2O_(3) under different conditions.The simulation results show that BeO IBFs has better electron transmittance than Al_2O_(3) IBFs,while Al_2O_(3) IBFs has better inferior ion blocking ability than BeO IBFs.It is proved that BeO is feasible as an ion barrier film.

关 键 词：防离子反馈膜 蒙特卡罗模拟 电子透过率 离子阻止率 

分 类 号：O463[机械工程—光学工程]