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作 者:许叶潞 XU Yelu(Xiamen Tianma Microelectronics Co.,Ltd.,Xiamen Fujian 361000,CHN)
机构地区:[1]厦门天马微电子有限公司,福建厦门361000
出 处:《光电子技术》2023年第2期177-180,共4页Optoelectronic Technology
摘 要:研究了6世代线生产的A产品边角白点不良问题。首先针对不良进行实物分析,然后利用Minitab软件的二元逻辑回归方法进行了数据分析,最后通过不同的工艺试验条件对不良进行改善。实验结果表明:不良区域封框胶被金属走线遮挡,遮挡比例是边角白点不良的重要影响因素;TOF-SIMS(Time of Flight Secondary Ion Mass Spectrometry)进一步分析发现不良区有更高含量的封框胶成分(丙烯酸类、双酚A类)。封框胶被金属走线遮挡,造成该区域封框胶固化不完全,导致封框胶成分析出溶入液晶,继而影响液晶正常偏转,产生边角白点不良。通过调整边角处的封框胶画法,可以有效降低不良率。实验改善了边角白点不良,为A产品的顺利量产打下了坚实基础。The corner white Mura issue of product"A"produced in line 6 generation was system-atically studied.Firstly,the physical analysis was carried out for the defects,and then the data simula-tion analysis was carried out by using the binary logistic regression method of Minitab software.Final-ly,the defects were analyzed and improved through different process test conditions.The experimen-tal results showed that the sealant in defect region was sheltered by metal wiring,and the shielding proportion was an important factor affecting the corner white dot.Further analysis by TOF-SIMS showed that defect region had higher content of sealant(acrylic acid,bisphenol A).Thus,the sealant was sheltered by metal wiring,resulting in incomplete curing of the sealant in this region,leading to the precipitation of the sealant component into the liquid crystal,which then affected the normal deflec-tion of the liquid crystal,resulting in white dot in the corner at last.By adjusting the corner of the seal-ant painting,it could effectively reduce the defect rate.This experiment effectively improved the cor-ner white dot,laid a firm foundation for the smooth mass production of product"A",and reduced the loss of the company.
关 键 词:薄膜晶体管液晶显示器 边角白点 封框胶
分 类 号:TN873.93[电子电信—信息与通信工程] TB497[一般工业技术]
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