四氯化硅冷氢化工艺及机理的研究进展  

Research progress on process and mechanism for cold hydrogenation of silicon tetrachloride

作　　者：刘继三 丁哲 张豪豪 陈锦溢 华超[2] 陆平[2] LIU Ji-san;DING Zhe;ZHANG Hao-hao;CHEN Jin-yi;HUA Chao;LU Ping(Hualu Engineering and Technology Co.,Ltd.,Xi'an 710065,China;Key Laboratory of Green Process and Engineering,Institute of Process Engineering,Chinese Academy of Sciences,Beijing 100190,China)

机构地区：[1]华陆工程科技有限责任公司,陕西西安710065 [2]中国科学院过程工程研究所绿色过程与工程重点实验室,北京100190

出　　处：《现代化工》2023年第7期30-34,共5页Modern Chemical Industry

基　　金：科技部重点研发计划(2019YFC1907600);宁夏回族自治区重点研发计划(2020BDE02025)。

摘　　要：介绍了国内外冷氢化过程的研究现状,综述了对冷氢化过程工艺优化、热力学分析以及反应机理等领域的研究进展,分析了目前研究与工业应用之间的差距,并展望了未来的研究方向。Global research status of cold hydrogenation process for silicon tetrachloride is introduced.Research progress in process optimization,thermodynamic analysis and reaction mechanism of cold hydrogenation process is reviewed.The gap between research and industrial application at present is analyzed,and the future research direction is prospected.

关 键 词：多晶硅 冷氢化 热力学 反应机理 气固反应 第一性原理 

分 类 号：TQ127.2[化学工程—无机化工]