基于UV-LIGA工艺的超窄带毫米波三频带通滤波器  

Ultra-Narrowband Millimeter-Wave Triple-Band Bandpass Filter Based on UV-LIGA Process

作　　者：屈增 秦瑞杰 王佳云 段俊萍[1,3] 张斌珍 Qu Zeng;Qin Ruijie;Wang Jiayun;Duan Junping;Zhang Binzhen(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China;School of Electrical and Control Engineering,North University of China,Taiyuan 030051,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051 [2]中北大学电气与控制工程学院,太原030051 [3]中北大学仪器与电子学院,太原030051

出　　处：《微纳电子技术》2023年第7期1077-1085,共9页Micronanoelectronic Technology

基　　金：国家自然科学基金(52175555);山西省基础研究计划青年项目(202203021212146);山西重点研发项目(国际合作)获得山西省“1331工程”重点学科建设基金(20183D421043);山西省创新社区基金(51821003)。

摘　　要：针对当前6G无线通信系统对3 mm毫米波器件的需求急速增加,为了提前应对在这一频段的通信协议划分,利用金属谐振腔和矩形波导设计出一款中心频率为102.03 GHz的单频带通滤波器。然后,基于多模传输理论将其优化为一款中心频率分别为96.83和106.31 GHz的单通道双频带通腔体滤波器。采用交叉耦合的方式引入传输零点,设计出一款在98~105 GHz的工作范围内,具有98.49、99.79和104.20 GHz三个中心频率的超窄带三频带通腔体滤波器,其3 dB相对带宽分别为0.32%、0.63%和0.30%。采用基于SU-8负性光刻胶的UV-LIGA工艺对样品进行加工,并使用搭建的W波段电磁性能测试平台完成对样品射频性能的测试,测试结果与仿真结果具有良好的一致性。In view of the rapid increase in the demand for 3 mm millimeter-wave devices in the current 6G wireless communication system,and for dealing with the communication protocol division in the frequency band in advance,a single-band bandpass filter with a center frequency of 102.03 GHz was designed with metal resonator and rectangular waveguide.Then,based on the multimode transmission theory,it was optimized into a single-channel dual-band bandpass cavity filter with the center frequencies of 96.83 and 106.31 GHz,respectively.Finally,an ultranarrowband triple-band bandpass cavity filter with three center frequencies of 98.49,99.79 and 104.20 GHz in the working range of 98-105 GHz was designed by introducing transmission zeros through cross-coupling.The 3 dB relative bandwidths are 0.32%,0.63%and 0.30%,respectively.The sample was fabricated by UV-LIGA process based on SU-8 negative photoresist,and the RF performance was tested by W-band electromagnetic performance test platform.The test results are in good agreement with the simulation results.

关 键 词：超窄带毫米波三频带通滤波器 UV-LIGA工艺 6G无线通信 交叉耦合 多模传输 

分 类 号：TN713[电子电信—电路与系统] TH703[机械工程—仪器科学与技术]