光学镀膜洁净生产线设计  

Design of Clean Production Line for Optical Coating

作　　者：姚春龙[1] 佟亚涛 李壮 刘添昊 白皓宇 YAO Chunlong;TONG Yatao;LI Zhuang;LIU Tianhao;BAI Haoyu(Shenyang Academy of Instrumentation Science Co.,Ltd.,Shenyang 110043,China)

机构地区：[1]沈阳仪表科学研究院有限公司,辽宁沈阳110043

出　　处：《科技创新与生产力》2023年第8期101-103,共3页Sci-tech Innovation and Productivity

摘　　要：本文基于某大型光学薄膜器件生产企业作业环境设计实践,探索出生产工艺流程,确定光学镀膜核心工序及生产线整体功能分区,结合各工序工艺要求及洁净等级对器件表面缺陷的影响程度,设计光学薄膜生产线各区域洁净度等级、温湿度、风量等需求及适宜选用的HVAC系统,实现减少光学薄膜器件表面缺陷目标的作业环境设计。Based on the design practice of a large optical thin film device production enterprise's operating environment,this paper explores the production process flow,determines the core process of optical coating and the overall functional zoning of the production line,and combines the process requirements and cleanliness level of each process to design the cleanliness level,temperature and humidity,air volume,and other requirements and suitable HVAC systems for each area of the optical thin film production line,so as to realize the design of operating environment to reduce the surface defects of optical film devices.

关 键 词：洁净等级 HVAC系统 光学薄膜器件 表面缺陷 

分 类 号：O484.41[理学—固体物理]