电子级正硅酸乙酯制备技术研究进展  

Advances in the Preparation Technology of Electronic Grade Ethyl Orthosilicate

作　　者：张兴毅 赵雄 万烨[1,2,3] 郭树虎 袁振军[1,2] 刘见华 ZHANG Xingyi;ZHAO Xiong;WAN Ye;GUO Shuhu;YUAN Zhenjun;LIU Jianhua

机构地区：[1]多晶硅制备技术国家工程实验室,河南洛阳471023 [2]洛阳中硅高科技有限公司,河南洛阳471023 [3]中国恩菲工程技术有限公司,北京100038

出　　处：《绿色矿冶》2023年第4期55-60,共6页Sustainable Mining and Metallurgy

基　　金：工业和信息化部工业强基工程项目(0714-EMTC02-5593/13);郑洛新国家自主创新示范区创新引领型产业集群专项(18100212700)。

摘　　要：正硅酸乙酯兼顾无机材料和有机材料的性能,广泛应用于化工、电子电气等诸多领域。重点介绍了电子级正硅酸乙酯的应用领域,比较了工业级正硅酸乙酯与电子级正硅酸乙酯的产品组分、颗粒度以及杂质含量。针对工业级正硅酸乙酯与电子级正硅酸乙酯质量上的差距,综述了目前国内外电子级正硅酸乙酯制备工艺的研究进展,包括络合分离、吸附和离子交换、组合精制等技术,这些技术均以工业级正硅酸乙酯为原料,通过有效去除正硅酸乙酯中的水分、氯离子、金属离子和其他杂质等,获得电子级正硅酸乙酯产品。通过对比各种提纯方法,展望了电子级正硅酸乙酯提纯技术的发展方向。Ethyl orthosilicate,which has the properties of inorganic materials and organic materials,is widely used in many fields such as chemical industry,electronics and electrical industry.The application field of electronic grade ethyl orthosilicate was mainly introduced.The product composition,particle size and impurity content of industrial grade ethyl orthosilicate and electronic grade ethyl orthosilicate were compared.In view of the quality gap between industrial grade ethyl orthosilicate and electronic grade ethyl orthosilicate,the research progress of the preparation process of electronic grade ethyl orthosilicate at home and abroad was reviewed,including complexation separation,adsorption and ion exchange,combined refining and other technologies.These technologies use industrial grade ethyl orthosilicate as raw material to obtain electronic grade ethyl orthosilicate products by effectively removing water,chloride ions,metal ions and other impurities in ethyl orthosilicate.By comparing various purification methods,the development direction of electronic grade ethyl orthosilicate purification technology was prospected.

关 键 词：电子级 正硅酸乙酯 提纯 吸附 络合 

分 类 号：TQ264.1[化学工程—有机化工]