TiCN,TiAlN,TiAlCN涂层研究现状  

Research Progress of TiCN,TiAlN and TiAlCN Coatings

作　　者：吴勇 杨汉哲 孙清云 陈辉 夏思瑶 WU Yong;YANG Hanzhe;SUN Qingyun;CHEN Hui;XIA Siyao(Wuhan Research Institute of Materials Protection Co.,Ltd.CAM,Wuhan 430030,China;State Key Laboratory of Special Surface Protection Materials and Application Technology,Wuhan 430030,China)

机构地区：[1]中国机械总院集团武汉材料保护研究所有限公司,湖北武汉430030 [2]特种表面保护材料及应用技术国家重点实验室,湖北武汉430030

出　　处：《材料保护》2023年第9期1-10,共10页Materials Protection

基　　金：国家重点研发计划项目(2020YFB2010400);湖北省重点研发计划项目(2021BAA210);国家自然科学基金面上基金项目(52175182);湖北省自然科学基金计划项目(2022CFB936)资助。

摘　　要：TiAlCN等硬质涂层能提高金属工件的表面硬度、耐磨性及抗腐蚀性,从而有效提高高速旋转条件下服役的刀具、磨具及汽车零部件的精密度和使用寿命。综述了TiN添加Al、C元素形成的TiCN、TiAlN及TiAlCN涂层的结构及应用,总结了添加元素Al、C对涂层结构及性能的影响及其作用机理。归纳了近几年TiCN、TiAlN及TiAlCN涂层的制备方法,包括直流磁控溅射法(DCMS)、高功率脉冲磁控溅射法(HiPIMS)、中温化学气相沉积法(MTCVD)和激光化学气相沉积法(LCVD)等,并对多元TiN涂层的未来发展方向进行了展望。Hard coatings such as TiAlCN can improve the surface hardness,wear resistance and corrosion resistance of metal workpieces,thereby effectively improving the precision and service life of cutting tools,abrasive tools and auto parts in service under high-speed rotation conditions.In this paper,the structure and application of TiCN,TiAlN and TiAlCN coatings formed by adding Al and C elements to TiN were reviewed,the effects of adding Al and C elements on the structure and properties of the coatings and their mechanism of action were summa-rized.The preparation methods of TiCN,TiAlN and TiAlCN coatings in recent years were summarized,including DC magnetron sputtering(DCMS),high power impulse magnetron sputtering(HiPIMS),medium temperature chemical vapor deposition(MTCVD)and laser chemical vapor deposition(LCVD).In addition,the future development direction of multicomponent TiN coatings was prospected.

关 键 词：硬质涂层 多元TiN涂层 物理气相沉积(PVD) 化学气相沉积(CVD) 

分 类 号：TG174.4[金属学及工艺—金属表面处理]