冷热复合处理对CrN涂层结构及力学性能的影响  

Influence of Cold-Thermal Composite Treatment on the Structure and Mechanical Properties of CrN Coatings

作　　者：朱睿 王谦之[1] ZHU Rui;WANG Qianzhi(College of Mechanical&Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京航空航天大学机电学院,江苏南京210016

出　　处：《材料保护》2023年第9期48-53,共6页Materials Protection

基　　金：国家自然科学基金青年基金(51705245)资助。

摘　　要：为了改善CrN涂层的塑性变形能力,通过增强阴极弧磁控溅射技术在316L不锈钢上制备了CrN涂层。利用管式炉和液氮对CrN涂层分别进行冷处理、热处理以及冷热复合处理。通过X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)、扫描电子显微镜(SEM)以及纳米压痕仪表征涂层在后处理前后的微观结构、形貌特征、残余应力及力学性能。结果表明:经过后处理的CrN涂层硬度均有小幅度降低,但其塑性变形能力均提高。其中,先热后冷复合处理几乎保持CrN涂层硬度不变(仅降低0.7%),同时提高了其塑性变形能力(提高3.1%),增强了其韧性。In order to improve the plastic deformation ability of CrN coatings,CrN coatings were deposited on 316L stainless steel by enhanced cathode arc magnetron sputtering.Afterwards,the CrN coatings were post-treated by cold,thermal or cold-thermal composite treatment via tube furnace and liquid nitrogen.The microstructure,morphology,residual stress and mechanical properties of coatings before and after post-treat-ment were analyzed by X-ray diffraction(XRD),X-ray photoelectron spectroscopy(XPS),scanning electron microscope(SEM)and nano-indenter.Results showed that the hardness of the CrN coating decreased slightly after post-treatment,but its plastic deformation ability in-creased.Among them,the composite treatment of heating first and then cooling almost kept the hardness of the CrN coating unchanged(only decreased by 0.7%),while improved its plastic deformation ability(increased by 3.1%)with enhancing its toughness.

关 键 词：CRN涂层 增强阴极弧磁控溅射 热处理 冷处理 冷热复合处理 力学性能 

分 类 号：TG174.4[金属学及工艺—金属表面处理]