基于二次调制原理的多层结构绝对式角位移传感器  

Multilayer absolute angular displacement sensor based on the re-modulation method

作　　者：刘小康[1] 康成蓥 于治成[1] 郑方燕[1] 王合文[1] Liu Xiaokang;Kang Chengying;Yu Zhicheng;Zheng Fangyan;Wang Hewen(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测与装备技术教育部工程研究中心,重庆400054

出　　处：《仪器仪表学报》2023年第5期214-222,共9页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(51935004,52125503);重庆市教委“成渝地区双城经济圈建设”科技创新项目(KJCX2020043);重庆市教委科学技术研究项目(KJQN202001133);重庆理工大学科研创新团队项目(2023TDZ008)资助。

摘　　要：为了在传感器径向尺寸不变的前提下,保持良好的测量精度和分辨率,以适应小型化需要的工业场合,提出了一种利用多层结构实现信号二次调制的圆时栅角位移传感器。传感器为3层结构,利用轴向空间,使内外环分别通过多层结构完成信号的二次调制,其中内环作为粗测环经二次调制后用于实现传感器的绝对定位,外环作为精测环经二次调制后,提高了传感器分辨率。采用PCB工艺制造了外径Φ=100 mm,内径Φ=50 mm的传感器样机,初步实验表明内外环同时施加激励时,内外环将分别受到对方产生的串扰影响,因此进一步提出分时施加激励的优化方法避免信号串扰的影响以提升测量精度。最终实验结果表明传感器能够实现绝对定位且分辨率提升了1倍,原始测量精度达到了±4.1″。To meet the industrial needs of miniaturization and maintain favorable precision and resolution,a circular time-grating angular displacement sensor is proposed by using multi-layer structure and re-modulation scheme.The sensor is a three-layer structure.Its inner and outer rings complete the re-modulation of the signal through the multi-layer structure by using the axial space.The inner ring is used as the rough measurement part to realize the absolute positioning and the outer ring through re-modulation is used as the fine measurement part to improve the resolution of the sensor.A prototype sensor with an outer diameter ofΦ=100 mm and an inner diameter ofΦ=50 mm is manufactured by PCB technology.Preliminary experiments show that when the inner and outer rings are excited at the same time,the inner and outer rings are affected by the crosstalk generated by each other.Therefore,a time division method is further proposed to avoid the influence of signal crosstalk to improve the measurement accuracy.The final experimental results show that the sensor can achieve absolute positioning and the resolution of the fine measurement part is doubled,and the original measurement accuracy reaches±4.1″.

关 键 词：角位移传感器 多层结构 二次调制 绝对式 分时结构 

分 类 号：TH712[机械工程—测试计量技术及仪器]