基于电涡流的多周期双极直线位移传感器  

Multicycle bipolar linear displacement sensor based on eddy current

作　　者：瞿金晨 郭赫男 李杰[1,2,3] 程灏彬 闻小龙 Qu Jinchen;Guo He′nan;Li Jie;Cheng Haobin;Wen Xiaolong(Department of Physics,University of Science and Technology Beijing,Beijing 100083,China;Beijing Engineering Research Center of Detection and Application for Weak Magnetic Fieldy,Beijing 100083,China;State Key Laboratory of Transducer Technology,Shanghai 200051,China)

机构地区：[1]北京科技大学数理学院,北京100083 [2]北京市弱磁检测及应用工程技术研究中心,北京100083 [3]传感技术国家重点实验室,上海200051

出　　处：《仪器仪表学报》2023年第5期260-266,共7页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(62031025);传感技术联合国家重点实验室基金(SKT2105)项目资助。

摘　　要：传统的基于电涡流的多周期位移传感器由于输出信号的周期重复性,难以解决断电重启后的绝对位置识别问题。提出一种基于电涡流的新型双极直线位移传感器。经过理论与仿真分析,验证了随着滑片的滑动,接收线圈中感应电压的幅值呈现正余弦变化。设计了双极敏感结构,通过上极多周期接收线圈保证位移的精确测量。下极布置单周期接收线圈对上级所处周期进行识别。通过感应信号偏移及幅值归一化处理算法提高精度,在实验室搭建传感器样机,以高精度电控平移台进行测试。经测试,新型多周期双极电涡流直线位移传感器可以实现绝对位置测量,在0~60 mm量程内测量误差为30μm,最大非线性为0.08%。突破了传统多周期涡流式位移传感器绝对位置无法识别的局限。Traditional eddy current based multi-cycle displacement sensors are difficult to solve the problem of absolute position identification after power failure and restart due to the periodic repetitiveness of the output signal.In this article,a new type of eddy current based bipolar linear displacement sensor is proposed.After theoretical and simulation analysis,it is verified that the amplitude of the induced voltage in the receiving coil shows a sine cosine variation with the sliding of the slide.A bipolar sensitive structure is designed to ensure accurate displacement measurement by means of a multi-cycle receiving coil at the upper pole.A single-cycle receiver coil is arranged at the lower pole to identify the cycle of the upper stage.The accuracy is improved by sensing signal offset and amplitude normalisation processing algorithms,and the sensor prototype is established in the laboratory and tested with a high precision electronically controlled translation table.The new multi-cycle bipolar eddy current linear displacement sensor has been tested to achieve absolute position measurement with a measurement error of 30μm in the 0~60 mm range and a maximum non-linearity of 0.08%.This breaks through the limitations of traditional multi-cycle eddy current displacement transducers where the absolute position cannot be identified.

关 键 词：电感式传感器 直线位移传感器 多周期 绝对位置 

分 类 号：TH712[机械工程—测试计量技术及仪器]