微电子工厂涉及的呼吸防护用品的标准  

Standards for Respiratory Protective Equipment Involved in Microelectronics Factory

作　　者：朱震宇 杨一 王振 何基康 ZHU Zhen-yu;YANG Yi;WANG Zhen;HE Ji-kang(Nanjing Guobo Electronics Co.,Ltd.;Nanjing Electronic Devices Institute;Jiangsu Guoheng Safety Evaluation Consulting Service Co.,Ltd.)

机构地区：[1]南京国博电子股份有限公司 [2]南京电子器件研究所 [3]江苏国恒安全评价咨询服务有限公司

出　　处：《中国标准化》2023年第16期80-85,共6页China Standardization

摘　　要：从事芯片生产的微电子工厂,常使用多种危险化学品,并有使用以上危险物质的工艺操作,涉及到呼吸防护用品的合适选择和正确使用。另外,存在对呼吸防护用品的配置和管理的相应标准和法律法规制度。在微电子工厂安全管理中必须合法、正确、有效地选型和使用呼吸防护用品。本文从4个方面归纳相关标准中重要条款,供呼吸防护用品选型和使用时比较参考。Microelectronics factories engaged in chip production often use a variety of dangerous chemicals,and use the above dangerous substances in the process operation.It involves the proper selection and use of respiratory protective equipment.There are corresponding standards and laws and regulations for the allocation and management of respiratory protective equipment.It is necessary to select and use respiratory protective equipment legally,correctly and effectively in the safety management of microelectronics factory.This paper summarizes the important clauses in the relevant standards in four aspects,which can be used as a reference for the selection and use of respiratory protectiveequipment.

关 键 词：呼吸防护用品 标准 微电子工厂 

分 类 号：X924.2[环境科学与工程—安全科学] TN40[电子电信—微电子学与固体电子学]