一种基于非共光路外差激光干涉反馈的新型纳米精密定位系统  

A novel nano accuracy positioning system based on feedback of heterodyne laser interferometry with non-coaxial beams

作　　者：张正宇 刘昱含 罗杰 赵维谦[1] ZHANG Zhengyu;LIU Yuhan;LUO Jie;ZHAO Weiqian(MIIT Key Laboratory of Complex-field Intelligent Exploration,School of Optics and Photonics,Beijing Institute of Technology,Beijing 10008l,China)

机构地区：[1]北京理工大学光电学院,复杂环境智能感测技术工业和信息化重点实验室,北京100081

出　　处：《光学技术》2023年第4期390-397,共8页Optical Technique

基　　金：国家重点研发计划课题(2017YFA0701203);国家自然科学基金仪器专项资助项目(61827826)。

摘　　要：针对精密定位平台大行程下定位精度不足的问题,提出一种基于非共光路外差激光干涉反馈的新型纳米精密定位系统。系统由非共光路外差激光干涉和高精度光栅构成复合反馈,保留了高精度光栅大行程高分辨率的优势,同时结合非共光路外差激光干涉协同定位,消除了光栅的安装误差和变形对定位精度的影响,提升了大行程下的定位精度。系统采用基于BP神经网络的预测微调定位技术,一定程度上提升了定位效率。实验结果表明,在100mm行程范围内,系统轴线双向定位精度可以达到28nm,轴线重复定位精度可以达到26nm。通过预测定位,定位结束门限设定为20nm时,系统定位微调时间可由1.65s以内缩短至0.6s以内。5mm/s的速度下,系统跟随误差可达100nm。Aiming at the problem of insufficient positioning accuracy of precision positioning platforms with large travel distances,a novel nanometer accuracy positioning system based on feedback of heterodyne laser interferometry with non-coaxial beams is proposed.The system consists of a composite feedback of heterodyne laser interferometry with non-coaxial beams and high-precision grating scale,which retains the advantages of high-resolution and large travel distance of high-precision grating scale,and combines with heterodyne laser interferometry with non-coaxial beams to form collaborative positioning which eliminates the influence of installation errors and deformation of grating scale on positioning accuracy,and improves the positioning accuracy under large travel distances.The system adopts predictive fine-tuning positioning technology based on BP neural network,which to some extent improves positioning efficiency.The experimental results show that within the travel range of 100mm,the system's axis bi-directional positioning accuracy can reach 28nm and its axis repeated positioning accuracy can reach 26nm.Through predictive positioning,when the positioning end threshold is set to 20nm,the system's positioning fine-tuning time can be shortened from within 1.65s to within 0.6s.At the speed of 5mm/s,the tracking error of the system can reach 100nm.

关 键 词：非共光路外差激光干涉 协同驱动 定位精度 预测定位 

分 类 号：TH741[机械工程—光学工程]