应用于划痕检测的白光共聚焦色散物镜设计  

Design of dispersive objective of chromatic confocal for scratch detection

作　　者：张进 向阳[1] 黄雷[2] 窦艳红[2] ZHANG Jin;XIANG Yang;HUANG Lei;DOU Yanhong(School of Electro-optical Engineering,Changchun University of Science and Technology,Changchun 130022,China;Jilin Key Laboratory of Measuring Instrument and Technology,Jilin Institute of Metrology,Changchun 130103,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]吉林省计量科学研究院吉林省计量测试仪器与技术重点实验室,吉林长春130103

出　　处：《应用光学》2023年第5期992-997,共6页Journal of Applied Optics

基　　金：中央引导地方科技发展资金吉林省基础研究专项(202002059JC)。

摘　　要：白光共聚焦位移传感器在机车轮轴划痕深度测量中有很好的适用性,色散物镜是决定传感器检测范围与分辨率的关键器件。根据检测需求,结合白光共聚焦原理和线性色散条件选择合适的初始结构,利用Zemax光学设计软件对初始结构进行优化与分析,设计了一款高线性度短共轭距色散镜头,测量范围为1 mm,工作光谱范围为400 nm~700 nm,镜头球差小于1.7μm,系统轴向位移分辨率为0.615μm,色散线性判定系数R2为0.9975,共轭距为104 mm,使镜头小型化的同时具有高分辨率和高线性度的优点。The chromatic confocal displacement sensor has good applicability in the measurement of the scratch depth of the locomotive wheel axle,and the dispersive objective is the key device that determines the detection range and resolution of the sensor.According to the detection requirements,combined with the chromatic confocal principle and linear dispersion conditions,an appropriate initial structure was selected.The Zemax optical design software optimized and analyzed the initial structure,and designed a high-linearity and short-conjugate dispersion lens.The measurement range is 1 mm,the operating spectral range is 400 nm~700 nm,and the spherical aberration of the lens is less than 1.7μm.The axial displacement resolution of the system is 0.615μm,the dispersion linearity determination coefficient R2 is 0.9975,and the conjugate distance is 104 mm,which makes the lens miniaturized and has the advantages of high resolution and high linearity.

关 键 词：划痕检测 色散物镜 光学设计 白光共聚焦 

分 类 号：TN247[电子电信—物理电子学]