太赫兹近场光学亚表面检测技术研究  

Research on Terahertz near-field optical subsurface detection technology

作　　者：童海泉 游冠军 TONG Haiquan;YOU Guanjun(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《光学仪器》2023年第4期9-16,共8页Optical Instruments

基　　金：国家重点研发计划(2017YFF0106304,2016YFF0200306)。

摘　　要：研究了太赫兹散射式扫描近场光学显微镜(Terahertz scattering-type scanning near-field optical microscopy,THz s-SNOM)对亚表面金属微纳结构的显微成像检测。首次采用自主搭建的THz s-SNOM系统对表面覆盖了六方氮化硼薄膜的金微米线进行太赫兹近场显微测量,获得了具有纳米量级空间分辨率和较高对比度的近场显微图。结合全波数值模拟,分析了THz s-SNOM探测亚表面金属微纳结构的空间分辨率、近场散射信号强度和成像对比度。研究表明,THz s-SNOM具有优良的亚表面显微成像检测能力,可应用于微纳电子器件的亚表面结构表征和缺陷检测。This paper investigated the microscopic imaging and detection of subsurface metal micro/nano structures using Terahertz scattering-type near-field optical microscopy(THz s-SNOM).For the first time,a self-built THz s-SNOM system was employed to measure the Terahertz near-field of gold micro wires covered with hexagonal boron nitride(h-BN)film on the surface,resulting in near-field microscopy images with nanometer-level spatial resolution and high contrast.Combined with full-wave numerical simulation,the spatial resolution,near-field scattering signal intensity,and imaging contrast of THz s-SNOM for detecting subsurface metal micro/nano structures were analyzed.The study shows that THz s-SNOM has excellent subsurface microscopic imaging and detection capabilities and can be applied to the subsurface structure characterization and defect detection of micro/nano electronic devices.

关 键 词：散射式扫描近场光学显微镜 亚表面检测 太赫兹成像 

分 类 号：O433[机械工程—光学工程]