基于HCT-FEM和3D电磁模型的SAW滤波器性能仿真系统  

SAW Filter Performance Simulation System Based on HCT-FEM and 3D EM Model

作　　者：陈华志 马晋毅[1] 罗文汀 陈彦光[1] 唐盘良[1] 杜雪松[1] CHEN Huazhi;MA Jinyi;LUO Wenting;CHEN Yanguang;TANG Panliang;DU Xuesong(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2023年第4期540-543,共4页Piezoelectrics & Acoustooptics

摘　　要：该文基于分层级联有限元(HCT-FEM)和三维电磁模型构建了一套声表面波(SAW)滤波器性能仿真系统。采用Matlab协同COMSOL建立的HCT-FEM模型计算声学元件导纳,用ANSYS建立的三维电磁模型计算含芯片走线、引线/金属球、封装外壳及测试电路的外部电磁S参数,并在ADS软件中对SAW滤波器频率响应进行复原。将该系统应用于一款芯片级封装(CSP)的普通SAW滤波器和一款表贴封装(SMD)的单晶薄膜SAW滤波器电性能仿真,仿真与实测结果吻合较好。In this paper,a SAW filter performance simulation system is constructed based on HCT-FEM and 3D EM model.The HCT-FEM model established by Matlab in collaboration with COMSOL is used to calculate the acoustic component conduction,and the 3D EM model established by ANSYS is used to calculate the external EM S parameters including chip alignment,lead/metal ball,package housing and test circuit.The frequency response of the SAW filter is recovered in ADS software.The proposed simulation system is applied to simulate the electrical performances of a normal SAW filter with chip scale package and a single-crystal film SAW filter with surface mount device package,both the simulation and measurement results show good agreement.

关 键 词：声表面波(SAW)滤波器 分层级联 电磁仿真 有限元法 

分 类 号：TN65[电子电信—电路与系统]