基于锤状沟槽型石英音叉的CO光声探测技术  

CO Photoacoustic Detection Technology Based on Hammer-Shaped Grooved Quartz Tuning Fork

作　　者：李尚志 吴高米 袁宇鹏 杨靖 张祖伟 武红鹏[2] 董磊[2] 马晋毅 LI Shangzhi;WU Gaomi;YUAN Yupeng;YANG Jing;ZHANG Zuwei;WU Hongpeng;DONG Lei;MA Jinyi(CETC Chips Technology Group Co.,Ltd.,Chongqing 401332,China;State Key Lab.of Quantum Optics and Quantum Optics Devices,Institute of Laser Spectroscopy,Shanxi University,Taiyuan,030006,China)

机构地区：[1]中电科芯片技术(集团)有限公司,重庆401332 [2]山西大学激光光谱研究所,量子光学与光量子器件国家重点实验室,山西太原030006

出　　处：《压电与声光》2023年第4期574-578,共5页Piezoelectrics & Acoustooptics

基　　金：重庆市技术创新与应用发展专项重点项目(微型化光声光谱二氧化碳传感器开发与产业化)。

摘　　要：针对传统商用标准石英音叉(QTF)具有振臂间距小和共振频率高等不足,该文面向气体检测领域的需求设计并制备了一款新型锤状沟槽型QTF,大气压下其共振频率为9.36 kHz,品质因数高达15000。该QTF的振臂间距为1 mm,使发散角较大的中红外光束能够无阻碍地通过振臂中心。此外,该QTF振臂顶部设有锤状结构,振臂表面刻蚀有沟槽,能提升压电耦合效率,从而增强光声信号。结合石英增强光声光谱(QEPAS)技术开发了基于该新型音叉的高灵敏CO气体传感系统。测试结果表明,CO气体传感系统的最小检测限低至7×10^(-9),归一化噪声等效吸收系数达到8.7×10^(-9)cm^(-1)·W/√Hz。通过对大气CO的连续实时监测,验证了该传感系统的有效性和可靠性。In view of the limitations of small prong spacing and high resonant frequency of commercial standard quartz tuning fork(QTF),a hammer-shaped grooved QTF was designed and manufactured to meet the needs of the gas detection.The resonant frequency of the QTF is 9.36 kHz at atmospheric pressure,and the quality factor is up to 15000.The prong spacing of the QTF is 1 mm,enabling the mid-infrared beam with a large divergence angle to pass through the prong spacing without hindrance.In addition,the top of the QTF prong is equipped with a hammer-like structure,and the surface of the prong is etched with grooves,which can improve the piezoelectric coupling efficiency and enhance the photoacoustic signal.Combined with quartz-enhanced photoacoustic spectroscopy(QEPAS)technology,a highly sensitive carbon monoxide(CO)sensing system based on the novel QTF is developed.According to the test results,the minimum detection limit of CO sensing system is 7×10^(-9)and the normalized noise equivalent absorption coefficient is 8.7×10^(-9)cm^(-1)·W/√Hz.The effectiveness and reliability of the sensor system are verified through continuous real-time monitoring of atmospheric CO.

关 键 词：石英音叉 光声光谱 气体检测 CO 实时监测 

分 类 号：TN384[电子电信—物理电子学] TM931[电气工程—电力电子与电力传动]