籽晶种植及掺硼形核对硬质合金表面金刚石涂层的影响  

Effects of seeding and boron-doped nucleation on diamond coating of cemented carbide surface

作　　者：余寒 夏鑫 朱俊奎 王润 张龙 窦金杰 李静 马莉[2] 魏秋平[1,2] YU Han;XIA Xin;ZHU Junkui;WANG Run;ZHANG Long;DOU Jinjie;LI Jing;MA Li;WEI Qiuping(School of Materials Science and Engineering,Central South University,Changsha 410083,China;State Key Laboratory of Powder Metallurgy,Central South University,Changsha 410083,China;School of Materials Science and Engineering,Changsha University of Science and Technology,Changsha 410114,China)

机构地区：[1]中南大学材料科学与工程学院,长沙410083 [2]中南大学粉末冶金国家重点实验室,长沙410083 [3]长沙理工大学材料科学与工程学院,长沙410114

出　　处：《粉末冶金材料科学与工程》2023年第4期404-412,共9页Materials Science and Engineering of Powder Metallurgy

基　　金：国家“十四五”重点研究发展计划(2021YFB3701800);国家自然科学基金(52202056、52274370、52071345、51874370);广东省“十三五”重点研究开发项目(2020B01085001);湖南省高新技术产业科技创新引领计划(2022GK4037、2022GK4047);粉末冶金国家重点实验室自主课题(621022230)与开放课题;湖南省教育厅资助科研项目(20C0037)。

摘　　要：为改善硬质合金刀具金刚石涂层的质量,提高金刚石涂层的形核密度以提升涂层的均匀性,本文采用热丝化学气相沉积法,在YG8硬质合金基体表面沉积纳米金刚石,研究籽晶种植和形核阶段掺硼对金刚石涂层形核和生长的影响。结果表明:采用质量浓度为1.0 g/L的氢端基纳米金刚石悬浊液进行籽晶种植时,样品表面籽晶密度最高、分布最均匀,后续生长的金刚石晶粒更加细小均匀,改善了涂层的均匀性和平整度。掺硼形核可抑制金刚石涂层中石墨相的形成,提高金刚石涂层的纯度,但硼的掺入使金刚石峰(D峰)的半峰宽(full width at half maximum,FWHM)增大,对金刚石结晶产生不利影响。籽晶种植可使涂层D峰的FWHM从17.43 cm^(−1)降低为10.91 cm^(−1),提升了掺硼形核阶段的结晶质量,削弱了掺硼的不利影响。将掺硼和籽晶种植相结合,所得金刚石晶粒尺寸最小约1~3μm,此时金刚石与石墨的拉曼峰强度比(ID/IG)高达12.83,涂层质量较好。此外在籽晶种植与掺硼形核共同作用下,金刚石涂层的结合性能显著提高,在600 N载荷下可达到HF1级别。In order to improve the quality of diamond coating on cemented carbide tools and increase the nucleation density to enhance the uniformity of the coating,the hot filament chemical vapor deposition was used to deposit nanodiamonds(NDs)onto the surface of YG8 cemented carbide substrate,the effects of seed crystal planting and boron doping in the nucleation stage on the nucleation and growth of diamond coatings were studied.The results show that when hydrogen-terminated nano-diamond suspension with a mass concentration of 1.0%is used for seed crystal plant,the seed density on the sample surface is the highest,the distribution is the most uniform,and the subsequent growing diamond grain size is finer and more uniform,which can improve the uniformity and flatness of the coating.Boron-doped nucleation can inhibit the formation of graphite phase in the diamond coating and improve the purity of the diamond coating,but increase the full width at half maximum(FWHM)of the diamond peak,which will have an adverse effect on diamond crystallization.Seed crystal planting can reduce the FWHM of diamond peak from 17.43 cm^(−1) to 10.91 cm^(−1),improve the quality of boron-doped nucleation crystallization,and weaken the adverse effects of boron-doped.By combining boron doping and seed crystal planting,the minimum diamond grain size is about 1−3μm,the ID/IG value is as high as 12.83,and the coating quality is good.In addition,under the joint action of seed crystal planting and boron-doped nucleation,the bonding performance of the diamond coating is significantly improved,and it can reach the HF1 level at 600 N.

关 键 词：金刚石涂层 籽晶种植 掺硼形核 晶粒尺寸 结合性能 

分 类 号：TG711[金属学及工艺—刀具与模具]