高品质因子氟化镁晶体微腔制备与测试  

Fabrication and Test of High Quality Factor MgF_(2) Crystal Microcavity

作　　者：瞿志二 潘奕捷 刘贤文 张诚 王瑾 屈继峰[1] QU Zhi-er;PAN Yi-jie;LIU Xian-wen;ZHANG Cheng;WANG Jin;QU Ji-feng(Center for Advanced Measurement Science,National Institute of Metrology,Beijing 100029,China;School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]中国计量科学研究院前沿计量科学研究中心,北京100029 [2]北京理工大学光电学院,北京100081

出　　处：《计量学报》2023年第8期1169-1175,共7页Acta Metrologica Sinica

基　　金：国家重点研发计划(2022YFF0608304,2021YFA1401200);国家自然科学基金(62075206,62205324,62105023)。

摘　　要：研制了基于直线电机、高精度光栅尺、力学反馈单元的精密自动磨抛系统。在制备晶体微腔时,该系统可准确控制晶体微腔的尺寸、厚度及外形。采用预成型、粗磨、粗抛以及精抛等步骤制备了具有高品质因子的氟化镁晶体梯形微盘腔。利用白光干涉仪表征精抛后的氟化镁晶体表面粗糙度为2.84 nm。通过搭建锥形光纤与晶体微腔耦合测试系统,采用光腔衰荡方法测得所制备的晶体微腔在1550 nm处的本征品质因子为4.55×10^(8)。Based on a linear motor,a high precision scale and a mechanical feedback unit,a precision automatic grinding and polishing system was developed.The system enabled accurately control the size,thickness and shape of the crystal microcavities during preparation.The trapezoidal micro-disk cavity of magnesium fluoride crystal with high quality factor was fabricated by preforming,rough grinding,rough polishing and fine polishing.The surface roughness of magnesium fluoride crystal after precision polishing was characterized to be 2.84 nm using a white light interferometer.By setting up a taper fiber and crystal microcavity coupling testing system,the quality factor of the prepared crystal microcavity was measured to be 4.55×10^(8) at 1550 nm by the optical cavity ring-down method.

关 键 词：计量学 光学微腔 氟化镁晶体 高品质因子 精密磨抛 

分 类 号：TB96[机械工程—光学工程]