双臂非共程点光源非定域干涉小角度测量方法  

The Method to Measure Small Angle by Two-arm Non-common Path Non-localized Interference of Point Light Source

作　　者：张宝武 崔建军[2] 欧阳烨锋 陈恺 方振远 ZHANG Bao-wu;CUI Jian-jun;OUYANG Ye-feng;CHEN Kai;FANG Zhen-yuan(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京100029

出　　处：《计量学报》2023年第8期1202-1207,共6页Acta Metrologica Sinica

基　　金：国家市场监督管理总局科技计划(2022MK220,2021MK188);浙江自然科学基金(LY22E050005)。

摘　　要：为了提高小角度测量的精度,提出了一种双臂非共程点光源非定域干涉小角度测量方法。通过建立小角度测量的理论模型,搭建测角系统,并采用大靶面无镜头小像素的CCD记录干涉同心圆环。其原理为利用暗环和亮环兼顾的多圆环回归拟合系列圆环圆心定位方法实现圆心侧移量的高精度测量,完成与激光干涉小角度测量仪进行比较测量实验。结果显示,所提方法在3 h之内,x方向上的稳定性波动幅度最大为-2.46″,y方向上的稳定性波动幅度最大值为-1.92″;测角重复性在±0.50″内最大偏差为-0.45″,与激光干涉小角度测量仪具有较好的一致性。In order to enhance the measurement precision of the small angle,a method to measure small angle by two-arm non-common path non-localized interference of point light source is presented.In the method,the angle measurement system is built by establishing the theoretical model of small angle measurement,and the interference concentric rings are recorded by the CCD without lens and small pixs on the large target surface.The principle of the method is to fit a series of rings and circle center positioning method by multi-ring regression with both dark ring and bright ring.The method can measure the lateral shift of the center of the circle with high precision,and complete the comparison measurement experiment with the laser interference small angle measuring instrument.For the proposed angle system,the results show that the maximum fluctuation of the stability is -2.46″in the x direction,and -1.92″in the y direction within three hours;the repeatability had good agreement with the small angle laser interference within ±0.50″which has a maximum deviation of -0.45″.

关 键 词：计量学 小角度测量 非定域干涉 同心圆环 双臂非共程 

分 类 号：TB922[一般工业技术—计量学]