集成电路用NTC热敏电阻温度计校准方法研究  

Investigation on Calibration Method of NTC Thermistor Thermometer Applied to Integrated Circuit Research on Calibration Method of NTC Thermistor Thermometer Used in Integrated Circuit

作　　者：李嘉豪 孙建平[1] 李婷[1] 汪洪军[1] 王光耀 陈泽川 高传吉 LI Jia-hao;SUN Jian-ping;LI Ting;WANG Hong-jun;WANG Guang-yao;CHEN Ze-chuan;GAO Chuan-ji(National Institute of Metrology,Beijing 100029,China;College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China)

机构地区：[1]中国计量科学研究院,北京100029 [2]中国计量大学计量测试工程学院,浙江杭州310018

出　　处：《计量学报》2023年第8期1208-1213,共6页Acta Metrologica Sinica

基　　金：中国计量科学研究院基本科研业务费(AKYZD2301-1)。

摘　　要：针对集成电路在21~23℃范围内近mK量级测温精度的需求,研究了负温度系数(negtive temperature coefficient,NTC)热敏电阻温度计的校准方法对集成电路测温系统精度的影响。利用比较法对24支3种不同型号的NTC热敏电阻温度计进行校准,使用最小二乘法进行基本方程、Hoge-1方程、Steinhart-Hart方程的系数计算,分析校准方程的内插残差,评价低阶精准校准方程的可行性,为集成电路制作工艺的高质量中的温度测控提供技术支撑。结果表明:基本方程、Steinhart-Hart方程、Hoge-1方程残差的标准偏差分别为2.29、0.63、0.65 mK;使用2个校准点的基本方程的性能最差,使用3个校准点的校准方程的Hoge-1方程表现出最好的内插性能,在集成电路窄温区温度精确测量方面具有较高的应用价值。Aiming at the requirement of near mK temperature measurement accuracy of intgrated circuit(IC)in the range of 21~23℃,the influence of the calibration method of negtive temperature coefficient(NTC)thermistor thermometer on the temperature measurement accuracy of IC is studied.The coefficients of the Basic,Hoge-1,and Steinhart-Hart equations are calculated using the least-squares method,and the interpolation residuals of the calibration eqution are analyzed to evaluate the feasibility of the low-order accurate calibration equation for high-quality temperature measurement and control of IC fabrication processes.The results show that the standard deviations of the residuals of the Basic equation,Steinhart-Hart equation,and Hoge-1 equation are 2.29 mK,0.63 mK,and 0.65 mK,respectively;the Basic exponential eqution with two calibration points has the worst performance,and the Hoge-1 equation with three calibration points shows the best interpolation performance,which is valuable for accurate temperature measurement in narrow temperature regions of IC.

关 键 词：计量学 热敏电阻温度计 负温度系数 校准方程 集成电路 窄温区 不确定度 

分 类 号：TB942[一般工业技术—计量学]