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作 者:申雅峰 江毅[1] 隋广慧[2] SHEN Ya-feng;JIANG Yi;SUI Guang-hui(School of Optical and Photonics,Beijing Institute of Technology,Beijing 100081,China;AVIC Changcheng Institute of Metrology and Measurement,Beijing 100095,China)
机构地区:[1]北京理工大学光电学院,北京100081 [2]中国航空工业集团公司北京长城计量测试技术研究所,北京100095
出 处:《计量学报》2023年第8期1235-1239,共5页Acta Metrologica Sinica
基 金:国家自然科学基金(U20B2057)。
摘 要:在光纤传感技术领域应用基于法珀腔(外腔式法布里-珀罗干涉腔)结构的光纤压力传感器进行气体压力测量时,由于传感器结构决定了腔长动态范围相对较小,需要高分辨率的腔长测量方法。因此针对基于法珀腔结构的光纤压力传感器进行绝对腔长解调算法研究,提出一种高精度最小偏差腔长解调算法,通过将法珀腔光纤压力传感器密封在压力标准源中,对等间隔压力变化产生的不同腔长进行实时解调,实现了气体压力的实时测量。实验结果表明,法珀腔光纤压力传感器腔长值随压差变化呈现出良好的线性关系和重复性,腔长测量的重复性为±1 nm,精度为0.1496%,压力测量的重复性为0.12%,压力测量的精度优于0.5%。When the gas pressure measurement is performed with fiber optic pressure sensors based on EFPI structures,a high-resolution cavity length measurement method is required,because the sensor structure determines that the dynamic range of the cavity length is relatively small.A high precision minimum-deviation cavity-length demodulation algorithm is proposed and experimentally demonstrated.The absolute cavity length of an optical fiber pressure sensor based on EFPI structure is recovered by using the demodulation algorithm.Through sealing an EFPI fiber optic pressure sensor in a pressure standard source,the real-time measurement of gas pressure is realized.The experimental results show that the cavity length of the EFPI fiber pressure sensor has a good linear relationship and repeatability with the change of pressure.The repeatability of cavity length measurement is±1 nm,the nonlinear error is 0.1496%,the repeatability of pressure measurement is 0.12%,and the accuracy of pressure measurement is better than 0.5%.
关 键 词:计量学 压力测量 光纤传感器 外腔式法布里-珀罗干涉腔 腔长解调
分 类 号:TB935[一般工业技术—计量学]
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