电子探针的研制现状与分析  

Present Condition of the Development of Electron Probe Micro-analyzer

作　　者：葛祥坤[1] GE Xiangkun(Beijing Research Institute of Uranium Geology,Beijing 100029,China)

机构地区：[1]核工业北京地质研究院,北京100029

出　　处：《山东国土资源》2023年第9期17-22,共6页Shandong Land and Resources

基　　金：中国核工业地质局地勘费项目:鄂尔多斯盆地特拉敖包矿床地浸水文地质条件及铀矿石物质成分特征研究(项目编号:测D2308)。

摘　　要：电子探针分析具有微区、原位、无损、分析速度快、分析元素范围广、定量分析准确度高等特点,是固体物质微区原位元素组成定量分析的主要技术手段,广泛应用于材料、地质、冶金、矿产、电子、生物、考古、空间科学等领域,但我国的电子探针长期依赖于进口,存在着“卡脖子”的风险。本文回顾了电子探针的研制历史,梳理了国内外电子探针的研制现状,总结了我国电子探针研制存在的问题和短板,指出了电子探针研制的发展趋势,以期为我国电子探针的研制提供借鉴。Electron probe micro-analyzer has the characteristics of micro-area,in-situ,non-destructive,fast analysis speed,wide range of elements analyzed and high accuracy in quantitative analysis.It is the primary technical means for quantitative analysis of the elemental composition in situ at the micro-area of solid materials.It is widely applied in various fields,including materials,geology,metallurgy,mining,electronics,biology,archaeology and space science.However,electron probe micro-analyzer has long relied on imports,and has a risk of dependence.In this paper,historical development of electron probe micro-analyzer has been reviewed,present condition of domestic and foreign electron probe micro-analyzer development have been summarized,the problems and shortcomings of electron probe micro-analyzer development in China have been identified,and the development trends in electron probe micro-analyzer has been pointed out.It will provide valuable insights for the research and development of electron probe micro-analyzer in China.

关 键 词：电子探针 研制现状 日本电子 日本岛津 法国卡梅卡 

分 类 号：P631.3[天文地球—地质矿产勘探]