高Q值半球谐振子精密加工技术研究  

Precision Machining Technology of High Q Value Hemispherical Resonator

作　　者：刘军汉[1] 熊长新[1] 曲天良 张熙 王潺 赵明强 LIU Jun-han;XIONG Chang-xin;QU Tian-liang;ZHANG Xi;WANG Chan;ZHAO Ming-qiang(Huazhong Institute of Electro-Optics-Wuhan National Laboratory for Optoelectronics,Wuhan 430223,China)

机构地区：[1]华中光电技术研究所—武汉光电国家研究中心,湖北武汉430223

出　　处：《光学与光电技术》2023年第4期117-123,共7页Optics & Optoelectronic Technology

基　　金：工信部高技术船舶科研项目(CB04N20);华中光电技术研究自筹资金科研项目(2280)资助。

摘　　要：半球谐振子的机械能量损耗包括材料本征损耗、空气阻尼损耗、支撑损耗、热弹性损耗和表面损耗等,直接影响了半球谐振子Q值。通过分析这些能量损耗的数学模型,总结出半球谐振子的关键技术指标是材料性能、形位精度和表面粗糙度。综合考虑半球谐振子的精度和工程化应用,提出了一套高精度半球谐振子加工工艺,经过精密磨削、精密抛光和化学抛光后,加工得到的谐振子球面圆度小于0.25μm,表面粗糙度小于15 nm,品质因数大于5.2×107。对高精度半球谐振子加工和半球谐振陀螺制造工程化具有重要的指导意义。The mechanical energy loss of the hemispherical resonator includes intrinsic loss of the material,thermoelastic damping loss,air damping loss,supporting loss and surface loss,which determines the Q factor of the hemispherical resonator.Through analyzing the mathematical model of the energy loss mechanism,the dominant errors affecting the hemispherical resonator are material properties,surface roughness,form and position accuracy.To solve the problem of processing precision and engineering applications,a processing technology to achieve the high precision hemispherical resonator is proposed.After optimizing of process parameters of precision grinding,precision polishing and chemical treatment,the surface roundness error of the hemispherical resonator is less than 0.25μm,the roughness is less than 15 nm and the quality factor is greater than 5.2x107.The research in this paper may be have important guiding significance for high precision hemispherical resonator and hemispherical resonator gyroscope engineering applications.

关 键 词：半球谐振子 能量损耗 圆度 表面粗糙度 品质因数 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]