自溯源型MOEMS加速度计谐振子设计仿真研究  

Design and Simulation of a Self-Traceable MOEMS Accelerometer Oscillator

作　　者：常郅坤 张婉怡 沈箫雨 牟群 韩晓玲 宋松 牛鹏飞 邓晓 程鑫彬[1,2,3,4,5] CHANG Zhikun;ZHANG Wanyi;SHEN Xiaoyu;MU Qun;HAN Xiaoling;SONG Song;NIU Pengfei;DENG Xiao;CHENG Xinbin(Institute of Precision Optical Engineering,Tongji University,Shanghai 200092,China;MOE Key Laboratory of Advanced Micro-Structured Materials,Shanghai 200092,China;Shanghai Frontiers Science Center of Digital Optics,Shanghai 200092,China;Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications,Shanghai 200092,China;School of Physics Science and Engineering,Tongji University,Shanghai 200092,China;School of Physical Science and Technology,Soochow University,Suzhou 215000,China;Faculty of Fundamental Education,Zhejiang University of Water Resources and Electric Power,Hangzhou 310018,China;State Key Laboratory of Precision Measurement Technology and Instruments,Tianjin University,Tianjin 300072,China)

机构地区：[1]同济大学精密光学工程技术研究所,上海200092 [2]先进微结构材料教育部重点实验室,上海200092 [3]上海市数字光学前沿科学研究基地,上海200092 [4]上海市全光谱高性能光学薄膜器件与应用专业技术服务平台,上海200092 [5]同济大学物理科学与工程学院,上海200092 [6]苏州大学物理科学与技术学院,苏州215000 [7]浙江水利水电学院基础教学部,杭州310018 [8]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《计量科学与技术》2023年第6期9-15,43,共8页Metrology Science and Technology

基　　金：国家重点研发计划项目(2022YFF0607600、2022YFF0605502);国家自然科学基金面上项目(62075165);上海张江国家自主创新示范区专项发展资金重大项目(ZJ2021-ZD-008)。

摘　　要：MOEMS加速度计是加速度传感器未来的发展趋势之一,光学位移检测手段是决定测量精度的核心因素,与之配套的谐振子设计、匹配关系是充分发挥其性能的关键要素。自溯源光栅干涉仪是一种超精密位移测量方法,具有测量直接溯源、精度高、小型化等优势,非常契合MOEMS加速度计的位移测量需求。结合自溯源光栅干涉仪特性,计算、设计并仿真了自溯源型MOEMS加速度计谐振子。基于谐振子力学理论模型,计算了谐振子刚度和固有频率,采用COMSOL软件仿真了谐振子谐振模态、不同轴向的灵敏度与应力分布,设计了位移灵敏度高达10.01μm/g,同时具有超低横向串扰的谐振子,对直接溯源型高精度加速度测量方案的技术研发与性能优化具有重要意义。MOEMS accelerometers are emerging as a pivotal trend in acceleration sensor technology.The accuracy of their measurements predominantly hinges on optical displacement detection methods.The coherent design and the congruence of the oscillator are pivotal for maximizing measurement efficacy.This study introduces a super-precise displacement measurement method,the self-traceable grating interferometry,marked by its direct traceability,high precision,and miniaturization,aligning seamlessly with the displacement measurement prerequisites of MOEMS accelerometers.Leveraging the properties of the self-traceable grating interferometry,we design,calculate,and simulate the oscillator of a self-traceable MOEMS accelerometer.Through the mechanical theory model,we deduced the stiffness and natural frequency of the oscillator.Utilizing the COMSOL software,simulations were run on its resonant modes,axial sensitivities,and stress distributions.Our design achievements include a oscillator with a remarkable displacement sensitivity reaching 10.01μm/g and exhibiting minimal cross-coupling.Such advancements underscore the value of this research in the realm of direct traceability and the refinement of high-precision accelerometer measurement paradigms.

关 键 词：计量学 MOEMS加速度计 自溯源光栅干涉仪 谐振子 COMSOL有限元仿真 固有频率 灵敏度 应力分布 

分 类 号：TB934[一般工业技术—计量学]