大功率量子级联激光器的光学与热学协同优化设计  

Optics and thermal co optimal design ofhigh power quantum cascade lasers

作　　者：杨若珂 张东亮 郑显通 田旺 柳渊 鹿利单 祝连庆[1,2] 王伟平 YANG Ruo-ke;ZHANG Dong-liang;ZHENG Xian-tong;TIAN Wang;LIU Yuan;LU Li-dan;ZHU Lian-qing;WANG Wei-ping(Beijing Engineering Research Center for Optoelectronic Information and Instruments,Beijing Information Science&Technology University,Beijing 100016,China;Instrumentation Science and Optoelectronic Engineering College,Beijing Information Science&Technology University,Beijing 100016,China;Intelligent Technology Research Institute of China Electronics Technology Group Corporation,Beijing 100015,China)

机构地区：[1]北京信息科技大学光电信息与仪器北京市工程研究中心,北京100016 [2]北京信息科技大学仪器科学与光电工程学院,北京100016 [3]中国电子科技集团公司智能科技研究院,北京100015

出　　处：《激光与红外》2023年第9期1350-1359,共10页Laser & Infrared

基　　金：北京学者基金项目(No.74A2111113);北京教育委员会研究项目(No.KM202111232019);国家自然科学基金项目(No.62105039);北京信息科技大学研究项目(No.2022XJJ07)资助。

摘　　要：针对大功率量子级联激光器存在热积累严重的问题,本文基于MBE与MOCVD结合的二次外延生长InP基量子级联激光器结构的工艺方法,设计优化中波单管4W连续光输出的大功率量子级联激光器光学与散热性能。通过COMSOL软件对器件结构进行建模,设计器件光学和热学结构模型,分析不同结构参数对器件性能的影响,得到最优结构参数:在In053Ga047As层厚度为50nm,波导下包层InP为1μm,上包层InP为2μm,封装金层厚度为3μm时,器件光学和热学综合性能最优,其中波导光限制因子为074,核心区温度为378 K。本文研究相关结论可为后续大功率中波量子级联激光器结构与工艺设计提供指导。To address the serious problem of thermal accumulation in high power quantum cascade lasers,the optical and thermal performance of high power quantum cascade lasers with 4 W continuous optical output from a single tube in medium wave is designed and optimized based on the process method of MBE and MOCVD combined with secondary epitaxial growth of InP based quantum cascade laser structures in this paper.The device structure is modeled by COMSOL software,and the optical and thermal structural models are designed to analyze the effects of different structural parameters on the device performance,and the optimal structural parameters are obtained:In0.53Ga0.47As layer thickness of 50 nm,waveguide lower cladding InP of 1μm,upper cladding InP of 2μm,and encapsulated gold layer thickness of 3μm,the device has the best combined optical and thermal performance,where the waveguide optical limiting factor is 0.74 and the core region temperature is 378 K.The results of this study can provide guidance for the structure and process design of subsequent high power medium wave quantum cascade lasers.

关 键 词：量子级联激光器 二次外延 波导结构 热学结构 协同优化 

分 类 号：TN242[电子电信—物理电子学] O436[机械工程—光学工程]