高精度光学元件控时磨削方法研究  

Research on time-controlled grinding methods for fabricating highprecision optical components

作　　者：孙梓洲 陈付磊 胡皓[1,2,3] 戴一帆 关朝亮[1,2,3] 彭小强 SUN ZiZhou;CHEN FuLei;HU Hao;DAI YiFan;GUAN ChaoLiang;PENG XiaoQiang(College of Intelligence Science and Technology,National University of Defense Technology,Changsha 410073,China;Hunan Key Laboratory of Ultra-Precision Machining Technology,Changsha 410073,China;Laboratory of Science and Technology on Integrated Logistics Support,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]国防科技大学智能科学学院,长沙410073 [2]超精密加工技术湖南省重点实验室,长沙410073 [3]国防科技大学装备综合保障技术重点实验室,长沙410073

出　　处：《中国科学：技术科学》2023年第8期1302-1312,共11页Scientia Sinica(Technologica)

基　　金：国家自然科学基金重大项目(批准号:51991371);国家自然科学基金重点项目(批准号:51835083)资助。

摘　　要：高精度、大口径光学元件的需求量与日俱增,传统铣磨-研抛-修形工艺路线因其较低的加工效率面临挑战.为提高光学元件制造效率,使其能快速达到最终修形工序的入口条件,本文将柔性砂带磨削工具引入光学确定性加工.通过研究光学元件控时磨削材料去除机理,提出一种新的材料去除方法,通过控制关键加工参数,成功获得了高效可控的去除函数.根据理论分析搭建了光学元件控时磨削样机,在一块200 mm×200 mm的平面微晶玻璃上进行控时磨削实验.结果表明面形误差由2.31μm PV、0.38μm RMS收敛至1.76μm PV、0.27μm RMS,过程用时仅53 min,效率为同尺寸磁流变抛光轮的10倍以上.控时磨削在修形同时可将微晶玻璃的毛面迅速抛亮,满足波面干涉测量要求.结果验证了光学元件高效控时磨削方法误差收敛的可行性,有望大幅缩短最终修形工艺前的研磨抛光加工周期.Owing to its low processing efficiency,the traditional milling–polishing–figuring process cannot meet the increasing demand for high-precision and large-diameter optical components.To increase the efficiency related to the manufacturing of optical components and enable the components to rapidly achieve the entrance conditions of the final figuring process,this paper introduces a flexible abrasive belt grinding tool for realizing the deterministic machining of optical components.Based on the material removal mechanism of time-controlled grinding of optical components,a new material removal method is proposed,and an efficient and controllable removal function is successfully obtained by controlling key processing parameters.A time-controlled grinding prototype for fabricating optical components was built according to theoretical analysis,and time-controlled grinding experiments were conducted on a 200×200 mm flat glass ceramic.The results showed that the surface error converged from 2.31μm PV,0.38μm RMS to 1.76μm PV,0.27μm RMS in 53 min.The efficiency of the prototype is>10 times that of a magnetorheological polishing wheel of the same size.Time-controlled grinding can enable the quick polish of the glass ceramic surface while figuring,meeting the laser interferometry requirements.These results verify the feasibility of the error convergence via the time-controlled grinding method of an optical component,which can shorten the grinding and polishing time before the final figuring process.

关 键 词：光学元件 控时磨削 确定性修形 高效率 

分 类 号：TH74[机械工程—光学工程] TG580.6[机械工程—仪器科学与技术]