非球面纳米精度可控柔体制造技术  

Nanoprecision controllable compliant technology for fabricating aspherical surfaces

作　　者：周港 郭双鹏 石峰[1,2,3] 翟德德 铁贵鹏 彭星 田野 谢凌波 王博 朱喆[1,2,3] ZHOU Gang;GUO ShuangPeng;SHI Feng;ZHAI DeDe;TIE GuiPeng;PENG Xing;TIAN Ye;XIE LingBo;WANG Bo;ZHU Zhe(College of Intelligence Science and Technology,National University of Defense Technology,Changsha 410073,China;Hunan Provincial Key Laboratory of Ultra-Precision Machining Technology,Changsha 410073,China;Laboratory of Science and Technology on Integrated Logistics Support,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]国防科技大学智能科学学院,长沙410073 [2]湖南省超精密加工技术重点实验室,长沙410073 [3]国防科技大学装备综合保障技术重点实验室,长沙410073

出　　处：《中国科学：技术科学》2023年第8期1337-1350,共14页Scientia Sinica(Technologica)

基　　金：国家自然科学基金(批准号:52105495,62175259);国家重点研发计划(编号:2020YFB2007504);中国科学院战略性先导科技专项(编号:XDA25020317)资助项目。

摘　　要：非球面被广泛应用于光学系统,其可被用来整形像差,改善画质,同时使光学系统更为紧凑,要求其具有纳米级面形精度与低吸收光学性质.目前超精密制造过程中,以恒定的去除函数解算面形误差,而光学表面误差分布复杂,针对不同频段与高度误差需迭代多次.针对这一问题,本研究团队提出了可控柔体制造技术,即去除函数随不同误差分布可控改变.本团队基于该理念,将传统连续出射的离子束可控离散,实现脉冲离子束超高分辨修形,并用于表面原子结构的光学性质调控,同时对于中频误差,以去除函数主动可控旋转的方式实现亚纳米级中频抑制技术,最后以大口径单晶硅为例,使用子孔径拼接技术完成了大口径非球柱面反射镜测量,实现了非球面镜的纳米精度可控柔体制造.本文结合本研究团队近几年的最新研究成果,总结了非球面可控柔体制造技术,通过探讨其发展现状,为非球面镜的纳米制造技术的发展提供参考.Aspherical surfaces are widely used in optical systems,which can be used to shape aberrations,improve picture quality,and make high-precision systems highly compact,requiring nanolevel profile accuracy and low absorption.Currently,a constant removal function is used to calculate the profile errors in the ultraprecision manufacturing processes.However,the surface error distribution of the aspherical surface is complicated,and multiple iterations are required for determining different frequency band and height errors.To solve this problem,we proposed a controllable compliant technology:the removal function changes are controllable with different error distributions.Based on this concept,we developed a controllable discretization technique for figuring the traditional continuously emitted ion beam,developed an ultrahigh-resolution technique for the figuring of pulsed ion beams,and applied the technique to control the optical properties of the surface atomic structure.Moreover,for the midfrequency error,the nanoprecision was obtained by the method of removal function active rotationremoving the active controllable rotation of the function.Finally,large-diameter monocrystalline silicon was introduced as an example.The subaperture splicing technique was used to measure the mirror,and the compliant fabrication technology of large-aperture silicon aspheric surfaces was realized.According to the latest research results of our team in recent years,we reviewed the controllable compliant technology for fabricating aspherical surfaces herein.The current developments in the technology can provide a reference for further developments in the aspheric fabrication technology.

关 键 词：纳米精度制造 非球面 超精密制造 可控柔体制造 

分 类 号：TH74[机械工程—光学工程]