形位误差对半球谐振子频率裂解的影响  

Effect of shape error on the frequency cracking of hemispherical resonators

作　　者：刘俊峰[1,2] 刘科显 赵羽乾 李飞 王林凤 陈善勇[1,2] LIU JunFeng;LIU KeXian;ZHAO YuQian;LI Fei;WANG LinFeng;CHEN ShanYong(Laboratory of Science and Technology on Integrated Logistics Support,National University of Defense Technology,Changsha 410073,China;College of Intelligence Science and Technology,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]国防科技大学装备综合保障技术重点实验室,长沙410073 [2]国防科技大学智能科学学院,长沙410073

出　　处：《中国科学：技术科学》2023年第8期1385-1399,共15页Scientia Sinica(Technologica)

基　　金：国家自然科学基金(批准号:51991732,52205505)资助项目。

摘　　要：半球谐振子是半球谐振陀螺(hemispherical resonant gyroscope,HRG)最重要的部件,其加工时引入的形位误差是造成其频率裂解并最终影响HRG精度的主要因素.本文通过优化网格划分方法建立理想半球谐振子有限元模型,大幅提升了仿真模型精度,分析了厚度误差、中径误差、端面误差、相对位置误差等各类形位误差对谐振子频率裂解的影响规律,利用滤波与同心处理从圆度测量数据中提取谐振子厚度差信息,同时采用白光干涉子孔拼接技术获取半球端面全口径面形,结合离子束加工技术验证了球壳厚度与端面面形度误差对半球谐振子频率裂解的影响,为进一步提高半球谐振子加工性能提供理论与技术支撑.The hemispherical resonator is the most important component of the hemispherical resonant gyroscope(HRG),and the shape errors introduced during its processing are the main factors that cause frequency cracking and eventually affect HRG accuracy.In this work,the finite element model of an ideal hemispherical resonator was established by the optimization of the mesh division method,which greatly improves the accuracy of the simulation model and analyzes the effects of different types of form errors,such as thickness,mid-diameter,end-face,and relative position errors,on the frequency cracking of resonators.Moreover,the resonator information of thickness errors was extracted from the roundness measurement data by filtering and concentric processing,and the full-aperture face shape of the hemisphere was obtained by the white-light interferometer subhole splicing technique.The obtained results and ion-beam processing technology confirm the effect of spherical shell thickness and end-face shape errors on the frequency cracking of hemispherical resonators.This paper provides theoretical and technical support to further enhance the processing performance of hemispherical resonators.

关 键 词：HRG 半球谐振子 形位误差 频率裂解 子孔拼接 

分 类 号：TN751.2[电子电信—电路与系统]