单片型像素探测器及其应用研究进展  

Advancements and applications of monolithic pixel detector

作　　者：邓文静 殷中宝[1] 王亚平[1] 杨苹 孙向明 周代翠[1] 黄光明[1] DENG WenJing;YIN ZhongBao;WANG YaPing;YANG Ping;SUN XiangMing;ZHOU DaiCui;HUANG GuangMing(College of Physical Science and Technology,Central China Normal University,Wuhan 430079,China)

机构地区：[1]华中师范大学物理科学与技术学院,武汉430079

出　　处：《中国科学：物理学、力学、天文学》2023年第9期229-236,共8页Scientia Sinica Physica,Mechanica & Astronomica

基　　金：国家自然科学基金(编号:12061141008,12075100);国家重点基础研究发展计划(编号:2022YFA1602103)资助项目。

摘　　要：单片型像素传感器将传感器和读出电路集成在同一硅片上,具有低物质量、低组装工作量和低成本的优点.近年来,单片型像素传感器在高能物理实验领域得到越来越多的关注,并已成功应用于STAR和ALICE实验中.通过商用CMOS集成电路技术和针对传感器的工艺优化,单片型像素传感器在抗辐照性能、空间时间分辨率、功耗和芯片面积等方面都取得了重大进展.本文旨在介绍单片型像素传感器及其研发过程中需要考虑的重要指标参数,并结合新工艺、新传感器结构和新读出架构对其研究进展进行概述.Monolithic pixel detectors,which combine sensor and readout on a single silicon chip,are gaining popularity as tracking detectors in high-energy physics.They have made significant progress in recent years and have been successfully implemented in STAR(Solenoidal Tracker at RHIC)and ALICE(A Large Ion Collider Experiment).They are fabricated using commercial CMOS technologies and normally undergo some process modification to boost their sensor performance.They offer advantages in detector capacitance,material budget,assembling effort,and total cost over conventional hybrid structures.Similar to commercial ASICs,their process feature size tends to decrease to improve time and spatial detection resolution,readout and computing speed,and power consumption in high-energy physics applications.This paper will provide an overview of monolithic active pixel sensors and their applications.Important aspects of developments will be summarized with some new technologies and innovative readout architectures.

关 键 词：像素探测器 单片型像素传感器 粒子探测 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术] TP212[自动化与计算机技术—计算机科学与技术]