Aerosol jet printing of piezoelectric surface acousticwave thermometer  

作　　者：Nicholas McKibben Blake Ryel Jacob Manzi Florent Muramutsa Joshua Daw Harish Subbaraman David Estrada Zhangxian Deng 

机构地区：[1]Micron School of Materials Science and Engineering,Boise State University,1910 W University Drive,Boise,ID 83725,USA [2]Department of Mechanical and Biomedical Engineering,Boise State University,Boise,ID 83725,USA [3]School of Electrical Engineering and Computer Science,Oregon State University,2500 NW Monroe Avenue,Corvallis,OR 97331,USA [4]Idaho National Laboratory,Idaho Falls,ID 83415,USA [5]Center for Advanced Energy Studies,Idaho Falls,ID 83401,USA

出　　处：《Microsystems & Nanoengineering》2023年第3期31-42,共12页微系统与纳米工程（英文）

基　　金：N.M.acknowledges technical and infrastructure support from Peter Miranda and Travis Gabel of the Idaho Microfabrication Laboratory,as well as general support and feedback from the Advanced Nanomaterials and Manufacturing Laboratory.D.E.acknowledges infrastructure support under DE-NE0008677 and and DE-NE0008496;joint appointment support under DOE Idaho Operations Office Contract DE-AC07-05ID14517;D.E.and Z.D.also acknowledge career development support from Institutional Development Awards(IDeA)from the National Institute of General Medical Sciences of the National Institutes of Health under Grants#P20GM103408 and P20GM109095.This work was prepared as an account of work sponsored by the U.S.Department of Energy,Office of Nuclear Energy Advanced Sensors and Instrumentation program under DOE Idaho Operations Office Contract DE-AC07-05ID14517.Neither the U.S.Government nor any agency thereof,nor any of their employees,makes any warranty,expressed or implied,or assumes any legal liability or responsibility for the accuracy,completeness,or usefulness,of any information,apparatus,product,or process disclosed,or represents that its use would not infringe privately owned rights.References herein to any specific commercial product,process,or service by trade name,trademark,manufacturer,or otherwise,does not necessarily constitute or imply its endorsement,recommendation,or favoring by the U.S.Government or any agency.The views and opinions of authors expressed herein do not necessarily state or reflect those of the U.S.Government or any agency thereof.

摘　　要：Surface acoustic wave(SAW)devices are a subclass of micro-electromechanical systems(MEMS)that generate an acoustic emission when electrically stimulated.These transducers also work as detectors,converting surface strain into readable electrical signals.Physical properties of the generated SAW are material dependent and influenced by external factors like temperature.By monitoring temperature-dependent scattering parameters a SAW device can function as a thermometer to elucidate substrate temperature.Traditional fabrication of SAW sensors requires labor-and cost-intensive subtractive processes that produce large volumes of hazardous waste.This study utilizes an innovative aerosol jet printer to directly write consistent,high-resolution,silver comb electrodes onto a Y-cut LiNbO3 substrate.The printed,two-port,20 MHz SAW sensor exhibited excellent linearity and repeatability while being verified as a thermometer from 25 to 200℃.Sensitivities of the printed SAW thermometer are−96.9×10^(−6)℃^(−1)and−92.0×10^(-6)℃^(−1) when operating in pulse-echo mode and pulse-receiver mode,respectively.These results highlight a repeatable path to the additive fabrication of compact high-frequency SAW thermometers.

关 键 词：SCATTERING WAVE SURFACE 

分 类 号：TB383[一般工业技术—材料科学与工程]