Mechanically resilient,alumina-reinforced carbon nanotube arrays for in-plane shock absorption in micromechanical devices  

作　　者：Eunhwan Jo Hojoon Lee Jae-Ik Lee Jongbaeg Kim 

机构地区：[1]School of Mechanical Engineering,Yonsei University,50 Yonsei-ro,Seodaemun-gu,Seoul 03722,Republic of Korea [2]Department of Neurosurgery,Massachusetts General Hospital,Harvard Medical School,25 Shattuck St,Boston,MA 02115,USA

出　　处：《Microsystems & Nanoengineering》2023年第3期73-81,共9页微系统与纳米工程（英文）

基　　金：This work was supported by the National Research Foundation of Korea(NRF)grant funded by the Korean government(MSIT)(No.2021R1A2B5B03002850).

摘　　要：Microelectromechanical systems(MEMS)are of considerable interest due to their compact size and low power consumption when used in modern electronics.MEMS devices intrinsically incorporate three-dimensional(3D)microstructures for their intended operations;however,these microstructures are easily broken by mechanical shocks accompanying high-magnitude transient acceleration,inducing device malfunction.Although various structural designs and materials have been proposed to overcome this limit,developing a shock absorber for easy integration into existing MEMS structures that effectively dissipates impact energy remains challenging.Here,a vertically aligned 3D nanocomposite based on ceramic-reinforced carbon nanotube(CNT)arrays is presented for in-plane shock-absorbing and energy dissipation around MEMS devices.This geometrically aligned composite consists of regionally-selective integrated CNT arrays and a subsequent atomically thick alumina layer coating,which serve as structural and reinforcing materials,respectively.The nanocomposite is integrated with the microstructure through a batch-fabrication process and remarkably improves the in-plane shock reliability of a designed movable structure over a wide acceleration range(0-12,000g).In addition,the enhanced shock reliability through the nanocomposite was experimentally verified through comparison with various control devices.

关 键 词：shock PLANE ARRAYS 

分 类 号：TB383[一般工业技术—材料科学与工程]