Ultra-resolution scalable microprinting  

作　　者：Callum Vidler Kenneth Crozier David Collins 

机构地区：[1]Department of Biomedical Engineering,University of Melbourne,Melbourne,VIC,Australia [2]School of Physics,University of Melbourne,Victoria 3010,Australia [3]Department of Electrical and Electronic Engineering,University of Melbourne,Victoria 3010,Australia [4]Australian Research Council(ARC)Centre of Excellence for Transformative Meta-Optical Systems,University of Melbourne,Victoria 3010,Australia [5]The Graeme Clark Institute,The University of Melbourne,Parkville 3052 VIC,Australia

出　　处：《Microsystems & Nanoengineering》2023年第3期195-207,共13页微系统与纳米工程（英文）

基　　金：This work was performed in part at the Materials Characterisation and Fabrication Platform(MCFP)at the University of Melbourne and the Victorian Node of the Australian National Fabrication Facility(ANFF).We thank A.Barlow for assisting with the collection of helium ion microscopy images and R.Dagastine for the assistance with material development.Dr.David Collins is the recipient of a Discovery Early Career Researcher Award from the Australian Research Council(DECRA,DE200100909);funding from the National Health and Medical Research Council(Ideas,APP2003446);K.B.C.was supported by the Australian Research Council Centre of Excellence for Transformative Meta-Optical Systems(Project No.CE200100010).

摘　　要：Projection micro stereolithography(PµSL)is a digital light processing(DLP)based printing technique for producing structured microparts.In this approach there is often a tradeoff between the largest object that can be printed and the minimum feature size,with higher resolution generally reducing the overall extent of the structure.The ability to produce structures with high spatial resolution and large overall volume,however,is immensely important for the creation of hierarchical materials,microfluidic devices and bioinspired constructs.In this work,we report a low-cost system with 1µm optical resolution,representing the highest resolution system yet developed for the creation of micro-structured parts whose overall dimensions are nevertheless on the order of centimeters.To do so,we examine the limits at which PµSL can be applied at scale as a function of energy dosage,resin composition,cure depth and in-plane feature resolution.In doing so we develop a unique exposure composition approach that allows us to greatly improve the resolution of printed features.This ability to construct high-resolution scalable microstructures has the potential to accelerate advances in emerging areas,including 3D metamaterials,tissue engineering and bioinspired constructs.

关 键 词：LITHOGRAPHY RESOLUTION PRINTING 

分 类 号：TB383[一般工业技术—材料科学与工程]