Analytical and experimental study of a valveless piezoelectric micropump with high flowrate and pressure load  

作　　者：Jiafeng Ni Weipeng Xuan Yilin Li Jinkai Chen Wenjun Li Zhen Cao Shurong Dong Hao Jin Lingling Sun Jikui Luo 

机构地区：[1]Ministry of Education Key Lab.of RF Circuits and Systems,College of Electron.&Info.,Hangzhou Dianzi University,Hangzhou 310018,China [2]Zhejiang Key Laboratory of Large-Scale Integrated Circuit Design,Hangzhou Dianzi University,Hangzhou 310018,China [3]Key Lab.of Adv.Micro/Nano Electron.Dev.&Smart Sys.of Zhejiang,College of Info.Sci.&Electronic Eng.,Zhejiang University,Hangzhou 310027,China [4]International Joint Innovation Center,Zhejiang University,Haining 314400,China

出　　处：《Microsystems & Nanoengineering》2023年第3期221-234,共14页微系统与纳米工程（英文）

基　　金：This work was funded by the National Natural Science Foundation of China(No.61827086,61974037,62175045);the National Key R&D Program of China(No.2021YFB3602200);the NSFC-Zhejiang Joint Fund for the Integration of Industrialization and Information(No.U20A20172);the Zhejiang Province Key R&D programs(No.2021C05004,No.2023C01192);The work was supported by the Fundamental Research Funds for the Provincial Universities of Zhejiang(GK239909299001-001,GK229909299001-408).

摘　　要：Miniaturized gas pumps based on electromagnetic effect have been intensively studied and widely applied in industries.However,the electromagnetic effect-based gas pumps normally have large sizes,high levels of noises and high power consumption,thus they are not suitable for wearable/portable applications.Herein,we propose a high-flowrate and high-pressure load valveless piezoelectric micropump with dimensions of 16 mm*16 mm*5 mm.The working frequency,vibration mode and displacement of the piezoelectric actuator,the velocity of gas flow,and the volume flowrate of the micropump are analyzed using the finite element analysis method.The maximum vibration amplitude of the piezoelectric actuator reaches~29.4μm.The output gas flowrate of the pump is approximately 135 mL/min,and the maximum output pressure exceeds 40 kPa.Then,a prototype of the piezoelectric micropump is fabricated.Results show that performance of the micropump is highly consistent with the numerical analysis with a high flowrate and pressure load,demonstrated its great potential for wearable/portable applications,especially for blood pressure monitoring.

关 键 词：PUMP PIEZOELECTRIC LOAD 

分 类 号：TB383[一般工业技术—材料科学与工程]