不同气压下毛细管放电三束等离子体发光功率  

Emitting Power of Three Plasmas in Capillary Discharge Under Different Gas Pressures

作　　者：张彧熙 蔡青[1] 张兴强[1] Zhang Yuxi;Cai Qing;Zhang Xingqiang(School of Mathematics,Physics and Optoelectronic Engineering,Hubei University of Automotive Technology,Shiyan 442002,China)

机构地区：[1]湖北汽车工业学院数理与光电工程学院,湖北十堰442002

出　　处：《湖北汽车工业学院学报》2023年第3期73-77,共5页Journal of Hubei University Of Automotive Technology

摘　　要：在给定毛细管结构参数和放电条件的情况下,计算了毛细管放电三束等离子体的发光功率,并在毛细管放电三束等离子体极紫外光刻光源演示装置上进行了实测,测量数据与理论值基本相符。结果表明:三束等离子体发光的过程中,由于不同氮气气压下的光谱吸收和光学屏蔽极大削弱了极紫外光的输出能量,导致毛细管放电三束等离子体的发光功率随氮气气压的变化表现出特有的规律;与毛细管放电单束等离子体相比,极大输出对应的最佳气压明显提高。In the case of the given structural parameters and discharging conditions of capillary,the emitting power of three plasmas in capillary discharge was calculated,and then it was measured on the demonstrative setup of the extreme ultraviolet lithographic source from the three plasmas in capillary discharge.The measured data were basically consistent with the simulated value.The experimental results show that the output energy of extreme ultraviolet light is greatly weakened by spectral absorption and optical shielding under different nitrogen pressures as the three plasmas glow,and thus the variation of the emitting power of the three plasmas in capillary discharge with nitrogen pressure displays a unique rule.Compared with single plasma in capillary discharge,the optimal pressure corresponding to the maximum output has been promoted obviously.

关 键 词：极紫外光刻光源 毛细管放电 三束等离子体 发光功率 

分 类 号：O539[理学—等离子体物理]