Low-temperature conformal vacuum deposition of OLED devices using close-space sublimation  

作　　者：Bryan Siu Ting Tam Shou-Cheng Dong Ching W.Tang 

机构地区：[1]State Key Laboratory of Advanced Displays and Optoelectronics Technologies,Department of Electronic and Computer Engineering,The Hong Kong University of Science and Technology,Clear Water Bay,Kowloon,Hong Kong,China [2]Institute for Advanced Study,The Hong Kong University of Science and Technology,Clear Water Bay,Kowloon,Hong Kong,China

出　　处：《Journal of Semiconductors》2023年第9期62-67,共6页半导体学报（英文版）

基　　金：financially supported by the General Research Fund(16309918)from the Research Grant Council,Hong Kong;funding from the Institute for Advanced Study of the Hong Kong University of Science and Technology。

摘　　要：Close-space sublimation(CSS)has been demonstrated as an alternative vacuum deposition technique for fabricating organic light-emitting diodes(OLEDs).CSS utilizes a planar donor plate pre-coated with organic thin films as an area source to rapidly transfer the donor film to a device substrate at temperatures below 200℃.CSS is also conformal and capable of depositing on odd-shaped substrates using flexible donor media.The evaporation behaviors of organic donor films under CSS were fully characterized using model OLED materials and CSS-deposited films exhibited comparable device performances in an OLED stack to films deposited by conventional point sources.The low temperature and conformal nature of CSS,along with its high material utilization and short process time,make it a promising method for fabricating flexible OLED displays.

关 键 词：close-space sublimation OLED thin film low temperature vacuum deposition 

分 类 号：TN383.1[电子电信—物理电子学]