基于衬底集成空心波导的气体检测性能研究  

Performance of gas detection based on substrate⁃integrated hollow waveguide

作　　者：黄文彪 方勇华 刘家祥 司赶上 李振钢 程真 斯贝贝 HUANG Wenbiao;FANG Yonghua;LIU Jiaxiang;SI Ganshang;LI Zhengang;CHENG Zhen;SI Beibei(School of Environment Science and Optoelectronic Technology,University of Science and Technology of China,Hefei 230026,China;Key Laboratory of Environmental Optics and Technology,Anhui Institute of Optics and Fine Mechanics,HFIPS,Chinese Academy of Sciences,Hefei 230031,China)

机构地区：[1]中国科学技术大学环境科学与光电技术学院,安徽合肥230026 [2]中国科学院合肥物质科学研究院安徽光学精密机械研究所环境光学与技术重点实验室,安徽合肥230031

出　　处：《量子电子学报》2023年第5期798-806,共9页Chinese Journal of Quantum Electronics

摘　　要：由衬底集成空心波导(iHWG)与傅里叶变换红外光谱仪(FTIR)结合组成的气体检测系统具有体积小、响应快、光路设计灵活、机械稳定性好等优点,能够用于污染气体实时在线检测。iHWG的几何参数如波导长度、横截面宽度和波导形状很大程度上影响了FTIR-iHWG系统的检测性能。基于空心波导的传输理论,理论分析了不同几何参数对iHWG传输特性的影响。以体积比浓度为100×10^(-6)的NO_(2)气体作为样本气体,设计了四种不同几何参数的iHWG,实验验证了理论分析的正确性。结果表明,同等条件下,横截面宽度越大的波导,其系统检测性能越高;对于不同形状的iHWG,直线型iHWG系统检测性能更好。此研究结果将为iHWG的进一步优化设计提供借鉴。The gas detection system composed of substrate-integrated hollow waveguide(iHWG)and Fourier transform infrared spectrometer(FTIR)has the advantages of small volume,fast response time,flexible optical design and good mechanical stability,which can be used for real-time online detection of pollution gases.The geometric parameters of iHWG,such as waveguide length,cross-section width and waveguide shape,can greatly affect the detection performance of FTIR-iHWG system.Based on the transmission theory of hollow waveguide,the influence of different geometric parameters is firstly analyzed on the transmission characteristics of iHWG.Then,four kinds of iHWG with different geometric parameters are designed using NO_(2)gas with a volume ratio of 100×10^(-6)as sample gas,and the correctness of the theoretical analysis is verified experimentally.The results show that under the same conditions,the larger the cross-section width of the waveguide,the higher the detection performance of the system.And for different shapes of iHWG,the linear iHWG system has better detection performance.The results of this work will provide useful reference for further optimization design of iHWG.

关 键 词：波导光学 傅里叶变换红外光谱 衬底集成空心波导 气体检测 几何参数 

分 类 号：O657.33[理学—分析化学]